NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

MLGC

70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32 40 30 23 30 112 146 182 16 53 50 30 25 37 132 167 199 20 63 60 25 28.5 37 132 167 202 60 20 63 20 33 44 162 210 227 25 73 70 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Power supply terminal Power supply terminal The circuits above are for the double wiring specification with up to 11 or 12 stations. Connect to SOL.A for a single solenoid.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

1

22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3

Peltier-type Chiller Thermo-con/ Compact Type

35C 100 100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

IDX-OM-W094

5 IDFA60 2722IDFA70,IDFA80,IDFA90 22 IDFA60 (IDFA70/80/90) 1) 2830Nm 2) 10.4 1 1 IDFA60/70/80/90 Series 10-2 IDX-OM-W094 R 11 R R (GFCI) 11.1 11.2 IDFA60-23-R IDFA70-23-R IDFA80-23-R IDFA90-23-R (A) 10 15 20 30 (mA) 30 IDFA60/70/80/90 Series 11-1 IDX-OM-W094 R 11.3 M3.5 1.01.3Nm M4.0 1.42.0Nm L N () TEST () [3.2.5 ] L N IDFA60/70/80/90 Series 11-2 IDX-OM-W094 T 12 T T 12.1

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

type (Except for 6) Single clevis type (Non-integrated type) Double clevis type 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

VM

Mechanical Valve Series VM Model VM1000 VM100 VM200 Side piping Bottom piping Side piping Bottom piping Dimensions (mm) 11 X 36 X 16 11 X 28 X 25 17 X 44 X 25 17 X 44 X 30 25 X 40 X 52 Basic Roller Lever One Way Roller Lever Straight Plunger Roller Plunger Cross Roller Plunger Toggle Lever Push Button (Mushroom) Push Button (Extended) Push Button (Flush) Twist Selector (2 position) Key Selector

Shot Pin Cylinder

0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80 40 115 + Stroke 60 + Stroke 0.05 35.8 36 1 View A-A 40 0.1 19.8 80 (Max

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Nominal size Item 15, 20, 30 10 0.2 to 0.6 MPa 0 to 60C 0.15 to 0.6 MPa Operating pressure Ambient and fluid temperature Size Suction flow rate L/min (ANR) 10/15 20/30 0.01 mm 180 c.p.m. 1 2 Repeatability Maximum operating frequency 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 3 Grease Cleanliness

NCQ8

Auto Switch Internal Circuit D-A90, A90V Contact protection box CD-P11 CD-P12 OUT () Brown Reed switch Unit: OZ, ( ): g Weight to OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.28 ( 8) 0.28 ( 8) Lead wire length 30 in (0.5 m) D-A93, A93V Lead wire length 118 in (3 m) 1.06 (30) 1.06 (30) 1.06 (30) 1.06 (30) 1.45 (41) 1.45 (41) Brown (+) Contact

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

IDX-OM-W095

T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

AC Servo Motor Driver (CC-Link Type)

Requires set up software(MR Configurator2TM) . -11- 3. Wiring 3.1 Power Supply Wiring Connect the actuator and driver power supply. (1) LECSC2-T (Absolute encoder) EX.)