High Vacuum L Type Valve XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.
Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.
) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400 267.4 230 510 915 1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935
Mount the marker (EX600-ZT1) into the marker groove as required. -15No.EX-OMX1011 SI Unit Model Indication and How to Order EX600-S EN 3 -X80 SI Unit Output type / Number of ports Symbol Content Protocol 3 PNP (negative common) / 2 port Symbol Content EN EtherNet/IPTM Summary of Product parts No.
mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm
300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.
Body size With sealant "S" is not applicable to M5 and U10/32 types, as they are not available with sealant. 2 3 4 M5 standard 1/8 standard 1/4 standard Model Applicable tube outside diameter Metric size Inch size 3 Universal 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With One-touch fitting For low speed control Thread type Port size M5 U10/32 01 02 Nil Metric
Size (in) 500 (5") 600 (6") 1.375 1-14 1.63 2.000 6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 1.63 7.38 6.63 8 MS1 Foot style (L) XA+ Stroke A P + Stroke 2-EE KK MM B AH AT LF + Stroke WF S AB E AO SA + Stroke AO Bore Size (in) MM KK A AB AH AO AT B E EE LF+ P+ S SA+ WF XA+ 500 (5") 1.000 3/4-16 1.13 .63 2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14
11-5 (1) DARA(24) (2) (50%)50% (25)50% (3) 0%100% (26 24 25 26 90 27 25 12.
316L SS secondary remelt Electropolish + Passivation SH Wetted Parts Body Surface finish Poppet Diaphragm Seat Hastelloy C-22 316L SS 316L SS PCTFE (Option: Vespel) PCTFE Dimensions Flow Characteristics inch (mm) SL5200 SL5210HF 100 psig (0.69 MPa) inlet Inlet pressure: 50 psig (0.34 MPa) inlet 0.97 (24.6) 70 0.48 60 0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34
R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90
It can cause malfunction or break the coil. 4-11-19
50 50 35 2-Rc 1/8 Pressure gauge port 60 IC VBA IR300-0 IR2120-02 50 Mounting hole VE 36 2 Bracket 30 VY1 (Option) 82 Mounting hole Pressure gauge 12.5 60 2.3 48 G (Option) Bracket (Option) 5.5 PPA 9.5 M5 depth 7 Panel mounting hole 75 83 119 18 11 Max. 4 Pressure gauge (Option) AL IN Bleed Exhaust SUP(1) OUT(2) OUT Panel 43 When mounting on a panel, refer to page 14-5-5 in Specific Product
XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002
XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200
Seat material Material Code Material PCTFE (Standard) Vespel 2) No code VS Code Body material 316L SS secondary remelt Hastelloy C-22 S H 2) Not available with H material.
kPa 13.3 kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S)
(No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300/50 Impact/Vibration resistance (m/s2) Note 1) Note 1) Impact resistance: No malfunction to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.
85 CXS10-35-XB19 35 107 90 40 CXS10-40-XB19 40 112 95 CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130 5 Series CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x
For more information, refer to page 13. 1 3 Position Cylinder Series RZQ Specifications 50 63 32 40 Bore size (mm) Action Double acting single rod Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 10 to 60C (with no freezing) Lubrication Non-lube Operating piston speed 50 to 300mm/s +1.0 Stroke length tolerance