PFxx-OMO0007CN

V300 24 V600 Max.30 V80 mA 1 V 2815 V 1 k 29420 mA 12 V300 24 V600 -40No.PF-OMO0007CN PF2A7--28--X560 PF2A7--68--X560 PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18 CFM10 -2 176 CFM10 -2 10 NL/min 100 NL/min PF2A711 3.5 CFM10 -1 35.5 CFM10

LFE-OMY0008

4 4 4 M12 IN OUT ( ( ( (2 2 2 2 ) ) ) ) ( ( ( ( ) ) ) ) UP UP UP UP SET SET SET SET DOWN DOWN DOWN DOWN (2 ) () OUT1OUT2 ON : UP ON/OFF SET DOWN ON/OFF 13 No.LFE*-OMY0008 F F.S.( 15V F.S.=5[V]1[V]4[V](1F.S.4[V]10.04[V]) a 1-5V 1-5V 4-20mA (HYS) ON OFF 63% ka () sa 10 L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12

Miniature Guide Rod Cylinder Series MGJ

Load voltage Lead wire length (m) Applicable load Type Special function Electrical entry Indicator light Wiring (output) Direct mounting 0.5 (Nil) 3 (L) 5 (Z) DC 3-wire (NPN) F8N U U u Solid state switch IC circuit Relay PLC 5 V 12 V Grommet (Perpendicular) 3-wire (PNP) F8P Yes 24 V U U u F8B 2-wire 12 V U U u Lead wire length symbols: 0.5 m . Nil (Example) F8N 3 m .

PSE5xx.eng

When piping, apply a spanner to the piping section of the sensor. 5 6 Safety Instructions PSE5 #-28 Current output: 4 to 20 mA Allowable load impedance: 500 or less (at 24 VDC) 100 or less (at 12 VDC) Wiring Warning Attaching the connector to the sensor wire Strip the sensor wire as shown below. Do not cut the insulation.

Soft Nylon Tubing TS/TISA Series

Operating Pressure TS0425 TS0604 TS0806 TS1075 TS1209 TS1612 TISA01 TISA05 TISA07 TISA11 TISA13 4 2.5 6 4 8 6 10 7.5 12 9 16 12 3.18 2.18 4.76 3.48 6.35 4.57 9.53 6.99 12.7 9.56 Tubing O.D. (mm) Tubing I.D.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Body BC6 Operating lever SPCC q w e r t 0.02 Rod C3604B Adjusting gear POM Gear POM 10 20 30 40 50 60 70 Flow rate (l/min) 16-12-2 3 Diaphragm Style Flow Switch Series IFW5 Dimensions IFW50--00 to 04 (Without terminal box) ZSE ISE PSE Z I SE3 PS With neon light Lead wire length 500 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

CEx-OMQ0010

200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100 1.5MPa 1Mpa 0.5MPa 0.1Mpa 0.3MPa 50~500mm/s 1 060 7-500mm 6H 250mm 2511000mm 1 4-2. 7.6

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

25

PA Mount with this surface up FLUID OUT Rc, NPT, G 1/8 PA(P) 84 72 60 41 7.5 45 PAX PB PB 2 x 4.5 Mounting hole Manual override pin PAF 66 16 PA PB Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated

ASD

Effective area (mm2) Effective area (mm2) 12 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-15

tTV2000/3000

Power supply (24VDC or 12 to 1sVDC) is required. Note 2) Select either analog output or switch output When switch output is selected, select either NPN output or PNP output.

PFMB.eng

] 500 L/min (PFMB7102) The accumulated flow has exceeded the accumulated flow range.

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Refrigerated Air dryer Series IDU/IDF

37 5200 R 1 1/2 9000 IDU55C 55 7650 50C R 2 12400 IDU75C 75 10500 35C 0.75 100 IDF1D 120 Series IDF Standard inlet air temperature type Rated temperature of 35 to 40C 1.5 200 IDF2D 235 Rc 3/8 2.2 300 IDF3D 350 R134a 9 to 12 40C 3.7 430 IDF4D 500 R 1/2 5.5 640 IDF6D 750 R 3/4 7.5 850 IDF8D 1000 1300 IDF11D R134a 11 R 3/4 1500 1300 IDF11C 15 2400 2050 IDF15C/15C1 R 1 22 3700 3150 IDF22C/22C1

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

For details, refer to the Web Catalog (VP300/500 Low wattage specification). * Refer to the Web Catalog (VP300/500 Low wattage specification) for details of the DIN terminal. Assembly Example Products do not come assembled. They should be ordered separately and assembled by the customer. eSpacer with bracket *2 rSpacer *2 * The Simple Specials System deals with product unification.

Micro-Mist Separator with Prefilter Series AMH

6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Display + 12 to 24 VDC 2% F.S.1 digit (25C3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

PSxx-OMT0005CN

OUT() DC(-) DC(+) PSE57-02-28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -11No.PS-OMT0005CN-A (A/D ) () 20 2030 -12No.PS-OMT0005CN-A PSE575 PSE576 PSE577 02 MPa 05 MPa 010 MPa 5MPa 12.5MPa 30MPa 5%F.S.(25 ) PSE57-02 PSE57-02-28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 ) 2.5F.S. 0.5F.S. 0.5F.S.(25 ) IP65 AC500V 1 100M(DC500 V) -1060 -2070 ()