Filter for Cleaning Solvent Quick Change Filter Series FQ1

Recommended flow rate Absolute filtration accuracy (m) Recommended flow rate (l/min) 2 4 20 6 13 Operating temperature: 0 to 80C Differential pressure resistance: 0.5MPa 8

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Rotary One-touch Fittings Manifold Series KM

D1 D2 L1 L2 L3 P Q1 Q2 M1 M2 6 KM13-04-06-3 10.4 18 19 20 21 22.5 13 15.5 15.5 19 19 60 63.5 70.5 74.5 81.5 12.8 9.9 11.1 11.1 12.8 12.8 13 16 18 23 27 17 18.5 18.5 21 21 4.5 6 6 7.5 7.5 4 10.4 16 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 6 12.8 17 45.4 10 10 8 15.2 18.5 52.6 KM14/Dimensions Applicable tube O.D.(mm) Part No. D1 H (Hex.)

4/5 Port Air Operated Valve Series SYJA3000 1

center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 2-4.3 (For mounting) 3 4 5 01 02 2-3.2 35 34 8.5 (For manifold mounting) 2-M5 x 0.8 (Pilot port) 17 B A 1 34 27 13 1 B A A B 3 1 1 R1 P R2 32.5 45.5 2-M5 x 0.8 31.5 38 (Pilot port) 64 2-3.2 Manual override 69.5 14 35 (For mounting) 89 Manual override 1/8,1/4 (P, A, B port) 29 28 25 21 1.6 14 89 18 2-

α PneuAlpha HARDWARE MANUAL

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

VXA21/22

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

2/3 Port Solenoid Valve for Chemicals

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

PSxx-OMT0001CN

2 ISA3--B-R ISA3--B-R ISA3--B-RN ISA3--B-LN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19 -24No.PS-OMT0001CN-E 2 ISA-17() Y200T-A() ISA-20() -25No.PS-OMT0001CN-E 2 ZS-31-B(()) ZS-31-C(()) ISA-21-() L 2 ISA-21-2 139 3 ISA-21-3 177 4 ISA-21-4 215 5 ISA-21-5 253 6 ISA-21-6 291 -26No.PS-OMT0001CN-E 3 SUP () (Nm) (Nm) ISA3 Rc1/8G1

K35-OMX0029

Signal name Input/output status Description 1 Sig-in+ Input 4-20 mA analog input signal (+) 2 Sig-inInput 4-20 mA analog input signal (-) 3 JOG+ Input JOG operation signal (Move to the extended end direction) 4 JOGInput JOG operation signal (Move to the retracted end direction) 5 PWR_DC24V DC+24 V Power supply 6 PWR_GND Power supply GND 7 Pos-out+ Output 4-20 mA analog output signal (+) 8

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

to +80C 20 to +70C 40 to +85C 25 to +90C Cable 20 to +70C Min. bending radius (Fixed) 67 mm 60 mm Protection class 100 IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Installation of Threads Caution Selection Caution KQ2 1.

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

MXH

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55 89 6 25 25 60 60 30 30

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [

2–4

2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Table of Contents - Tubing

roll Symbol 20 100 Tube O.D.

Refrigerated Air dryer Series IDU/IDF

to 15 R22 37 6100 5200 IDF37C/37C1 R 11/2 55 9000 7650 IDF55C R 2 75 12400 10500 IDF75C 2 1/2B flange 23000 IDF120D 20 120 30 IDF150D 25000 150 40C R407C 3B flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000 IDF190D