air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

MHF2

Bore size (mm) Without auto switch (Built-in magnet) Auto switch 8 12 16 20 8 12 16 20 Nil Body option Nil: Axial piping type R: Side piping type Action Double acting D Stroke Nil 1 2 Short stroke Medium stroke Long stroke Port Port Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHF2

MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 40 30 20 10 0 0 80 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

RSH/RS1H

138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9 19 109 49 5 12.5 10-9-20

RSH/RS1H

H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9

EX600-DX_DY_DM_eng

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

Escapements Series MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

1 to 12 stations Side 1 to 12 stations 26P P kit: Flat ribbon cable 420 20 20P 1 to 9 stations C8 (For 8) 10-SS5Q13-10-SQ131 J kit: Flat ribbon cable PC wiring system compatible L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) 1 to 8 stations 420 20 Top Note 2) 1 to 12 stations L kit: Lead wire 460 35 1 to 8 stations 475 20 S kit: Serial transmission Note 1) One-touch fittings in inch sizes

ZL3-OM00801

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

MRQ

(mm) (mm) 5 20 25 30 10 15 Stroke 50 40 75 100 Y 15 15 20 20 25 12.5 12.5 17.5 15 30 Q 30 20 20 20 73.5 E 66 71 63.5 63.5 63.5 58.5 61 61 61 MRQFS32SMRQ32, #3 (Flange only) 1.5-13 Series MRQ Size40 Basic Style/MRQBS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

A port 1/8 SS3YJ7-20 -05 -A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both

Compact Cylinder with Air Cushion and Lock Series RLQ

14 14 16 D-A79W D-A9, A9V 1 pc. 2 pcs. 20 20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F D-F7W D-J79W D-F7BAL D-F79F D-F9BAL 6 6 6 6.5 Number of auto switch D-F7LF D-A9 D-F9 D-A79W 7.5 7.5 8 D-F7LF 7.5 D-F9, F9V D-F9W, F9WV D-F9BAL 1 pc. 2 pcs. 20 20 20 20 25 25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less VQ1101 VV5Q11Side VQ101 Metal seal 3.6 (0.2) 10 or less 13 or less VQ1200 Double M5 (M5 threads) 5.4 (0.3) Rubber seal 15 or less 20 or less VQ1201 C10 (for 10) C4 (for 4) C6 (for 6) C8 (for 8) 1051 (single) 1144 (double, 3P) 3.6 (0.2) Metal seal VQ1300 20 or less 26 or less VQ1000 Closed center VQ2000 VQ200 2 to 16 stations Options: Built-in silencer Direct exhaust VV5Q21Side 5.4