High Vacuum Angle Valve, XL Series

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).

AC Servo Motor Driver (SSCNET Type)

Parameter list (Driver side) . 13 6.

IDX-OM-W053

(1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimension L=12.5n+10.5 35.5 1 23 No. 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 L 260.5 No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

XL

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

Process Pump

With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5

Compact

Note 10) A reference value for correcting an error in reciprocal operation. 13 800 14 900 15 1000 Switch and Acceleration Note) Table 2 Switch no. Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

HRX-OM-R016

Press the [SEL] key 13 times. The set screen of data reset is displayed on the digital display. PV SV 3. Select from the table below with [] key or [] key, and confirm by pressing SEL. Select , then all data returns to default setting. The display returns to the main screen.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

LECP6_C

LEC-OM08002 DC24V / / LECP6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 1. 9 2. 9 3. 9 4ON .10 5().10 6.10 3. .11 3.1. .11 3.2.12 3.3. .13 1 LECP6.13 2 DIN LECP6D.13 3.4.14 1.14 2.14 3.15 4. .16 4.1 CN1.16 4.2 CN2CN3:.16 4.3 CN4I/O .16 1.16 2.17 4.4 CN5I/O .17 5. CN1:.18 5.1 .18 5.2 .18 5.3 .19 (1) .19 1 - (2) .19 (3) .19 5.4 .20 1.20 2.21 3().22 6.

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Workpiece weight: 0.05 kg 25 20 0.5 Gripping force (N) 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).

LJ1H

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 Compatible model 1 G LJ1 05 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).