19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied
141.8[146.2] Approx. 300 (Lead wire length) 91 57.5[64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) 44.5 68.6[75.6] Approx. 300 20 20 20 20 87.6 37.6 122.2[126.6] 81.1 31.1 22 22 22 22 65.1 15.1 161.8 63 63 63 63 160 MAX.10 140 22 22 22 22 31.5 31.5 31.5 31.5 45.9[48.1] 11.5 11.5 11.5 11.5 45 55.9 12 12 12 12 55 25.5 25.5 25.5 25.5 36.1[38.3] Refer to page 563 for dimensions
C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5
C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22
Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.
[131.4] Approx. 300 83.4 75.9 64.6 Max. 10 145.2 65.4 35.2 50.6 [57.6] 49.5 55.1 37.6 M8 x 1 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 107.4 [111.8] 97.4 28 18 18 18 18 28 18 18 28 18 18 28 125.2 110.4 147 9.5 22 9.5 22 22 9.5 22 9.5 Note) Refer to page 176 for dimensions of connector types. 65 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 3 position closed
L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.
Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.
22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 50 80 M8 X 1.25 M10 X 1.5 M10 X 1.5 M12 X 1.75 M14 X 2.0 3.17-3 Compact Guide Cylinder Series MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Compact guide cylinder M 25 30 Z73 MGP Number of auto switches Compact guide cylinder 2 1 S Bearing M L Slide Ball bushing Auto switch Without auto switch (Built-in
VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.
10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.
18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.
X 10 Y 12 1/4 KQ2H12-02GS 19 17.2 18.2 28.7 24 17 58.3 46.1 9 24.3 3/8 KQ2H12-03GS 19 17.2 18.2 25.9 20.8 17 58.3 46.1 9 25.2 1/2 KQ2H12-04GS 22 22 18.2 22.3 15.9 17 58.3 58.3 9 37.7 Applicable tubing O.D.: 4, 6 16 3/8 KQ2H16-03GS 24 22 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04GS 24 22 23.6 32.1 25.7 20.6 113 67 13 44.6 *1: D is the body diameter. *2: Reference dimensions after installation
1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.
Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.
22 22 22 2-Rc(PT)1/4 31.5 18 18 31.5 (R1, R2 port) 63 63 [ ] for AC Other dimensions are the same as the grommet style
CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.
20.5 20 8 17 38 23.5 M14 x 1.5 32, 40 22 20.5 25 8 22 42.0 23.5 M14 x 1.5 Refer to the Web Catalog for details on the rod end nut and mounting bracket.