._3d_items_collection = {}; } SMC KQ2P-04 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $0.79 + Add to Quote Add To Cart Add to Cart SMC SX3000-53-1A

._3d_items_collection = {}; } SMC KQ2P-06 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $0.92 + Add to Quote Add To Cart Add to Cart SMC SX3000-53-1A

._3d_items_collection = {}; } SMC KQ2P-03 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $0.79 + Add to Quote Add To Cart Add to Cart SMC SX3000-53-1A

._3d_items_collection = {}; } SMC KQ2P-03 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $0.79 + Add to Quote Add To Cart Add to Cart SMC SX3000-53-1A

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Air Fittings Fitting Series For Special Environment

N L1 L2 Port B min. port size L3 L4 L5 L6 D P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 80 10 6 6 10 40 47 23.3 13 19.5 33.5 23.5 33 13.5 19 22 8.5 10 106 6 89 10 120 55 73 53 55 KRM11-08-12-10 KRM11-08-12-6 8 12 25.7 15.5 22.5 37.5 26 36.5 20.5 24 10 11.5 14.7 86 74 KRM12 Weight (g) Applicable tube O.D.(mm) Thread Rc(PT) H (Hex.) Port B min. port size Part No.

CNS

11 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

VZS

17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 L1 L2 3-7-17 18 Series VZS2000 Non plug-in type Manifold VV5ZS2-51Station 1Port size Grommet (G) Manual override 4-4.5 mounting hole U side (n) (2) (1) Stations D side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x 1.25 x 23l 76 18 2-M6 x 1.0 2-11 counterbore depth 6.3 W X Y T TT U UU V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread depth 6.5 8-M4 x

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) 12 (14) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

Ejector Valve Unit Series ZYY/ZYX 1

18 22 32 Max. vacuum pressure (kPa) 84 53 84 53 Compact (integrated construction of ejector and valve) Copper-free measures implemented Maximum operating pressure 0.6 MPa Standard supply pressure 0.45 MPa ZX Operating temperature range 5 to 50C ZR ZM Supply/Release Valve Specifications ZH Pilot type 3 position 3 port solenoid valve Valve type ZU Closed center Type of actuation Courtesy of

New

6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

7

56 56 5 5.5 5.5 40 57 End Bracket Single Knuckle Joint Double Knuckle Joint 12 +0.027 H8 0 Shaft: 12 0.050 d90.093 Press-fit spring pin 3 x 38 L 19 19 Press-fit spring pin 3 x 38 L Hole: 12 +0.027 H8 0 30 30 17 17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20

7

13 37.5 42.5 25 25 30 47.5 (53) 3 A VXD2 64.5 52.5 Model Mounting bracket dimensions Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: 01N (NPT 1/8)

Manifold Type: 42 (Base Mounted), Valve Stations: 11 Stations, A, B Port: 01N (NPT1/8)

CC

Valve type 10-17-10 11 Valve Unit Series CCVS/CCVL Solenoid Valve Specifications of Combined Valve (Stop valve/Skip valve) Applicable Converter Solenoid Valve Function Plate N.C. N.O.

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

17

6 PG 7 VV QQ 16 SS 6 XX UU 18 MY1B25 MY1B32 MY1B40 60 30 12 206 42 15 10 14.5 23.3 11 15.5 38.5 46 220 Rc1/16 MY1B25 MY1B32 MY1B40 26.5 Rc1/8 80 35 70 10 16 8 51 16 10 16 28.5 12 20 55 280 Rc1/16 264 48 16 11 32 40 Rc1/4 100 85 12 18.5 9 59 23.5 14 20 35 14 67 340 Rc1/8 40 23.5 322 60.5 24 12 35 47 Port Variations Bottom Ported MY1BG Y Y Head cover piping connection can be freely selected

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q E D C Y 2.5 A B Dimensions A (mm) B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by tube diameter (mm) Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 40, 50 12.8 26.2 11 Lateral Vacuum Entry Series ZPR With Buffer How to Order ZPR 10 F GN J 30 06 A10 Mounting thread diameter/male thread (Refer to Table 1 for applications