SY3000/5000/7000/9000 Series (Pilot Valve:V100)

-1A SX5000-53-1A For U side 5 Round head SY3000-23-4 M3X26(Matt nickel combination screw plated) 6 Gasket SX3000-57-4 SX5000-57-6 7 DIN rail VZ1000-11-1Refer to page 14 SY3000*-OMJ0003-A -22- Specific Product Precautions 16 Be sure to read before handing.

MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

Ejector Valve Unit Series ZYY/ZYX 1

Note 1) Note 2) Nil 1 None With silencer Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 0.7 mm 1.0 mm 07 10 13-8-4 5 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 Lead wire/ Voltage suppressor specifications Plug-in type Serial transmission type LOZ

Pneumatic Transfer System Series MF

Replacement parts: Seal kits Contents A set of above Nos. 53 through 58 Bore size (mm) 32 Seal kit No.

LJ1H

Refer to page 100 for part numbers. 53 54 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 G NA 1 F W X10 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

ISO Cylinder

Made to order For details, refer to page 53. Head cover type F Boss-cut/Basic Y Head cover axial port Auto switch Nil Without auto switch * For applicable auto switches, refer to the table below. * Auto switches are shipped together with the product. Bore size 8 8 mm 10 10 mm 12 12 mm 16 16 mm 20 20 mm 25 25 mm Cylinder stroke [mm] Refer to the next page for standard strokes.

Rotary Actuator/Vane Type

bumper With auto switch (WJ shaft) Variations With angle adjuster (WJ shaft) With auto switch and angle adjuster (WJ shaft) Option Mounting With flange F Pattern Shaft pattern Made to Order Rotating angle pattern The CRB series only 50 C O N T E N T S Rotary Actuator/Vane Type CRB2 Series CRB2 CRB2 CRB1 V Rotary Actuator/Vane Type CRB2 Series MSU How to Order Page 52 CRJ Specifications Page 53

JXCx-OMU0026

(Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode. Acceleration 1 to Max ACC/DEC in the basic parameters Set the deceleration from travel speed to stop. (Unit:mm/s2) Refer to (1) to (5) on page 53 for deceleration speed setting for movement mode.

LEC-OM034xx

Electric actuators/Common precautions .49 15.1 Design and selection .49 15.2 Mounting.50 15.3 Handling.51 15.4 Operating environment .52 2 - 15.5 Maintenance .53 15.6 Precautions for actuator with lock.53 16.

JXCx-OMT0002

JXC-OMT0002-C Description Input range Explanation Stroke (-) to Stroke (+) in the basic parameters Set the target position (Unit: mm) Refer to (1) to (5) on page 53 for position setting for movement mode. Position Set the acceleration to reach to travel speed. (Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to pages 17-5-53 through 17-5-55 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) Soft PBT (UL94 V0) PA66 (UL94 V0) TPU (UL94 HB) Material Material of sheath (Sheath color) PUR (Purple (RAL 4001 equivalent)) PVC (Light blue) Weight Approx. 308 g Approx. 306 g 1 m: Approx. 100 g 5 m: Approx. 355 g Approx. 47 g Approx. 53

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 53 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 F W X10 NA 1 G Cable entry direction Top entry Cable entry direction Power supply voltage Switch Motor specification Matsushita Electric Industrial Co., Ltd.

IZx-OMT0049

Note 53) Press S button once Press S button once [Channel selection mode] Note 53) In Channel selection mode, frequency set mode, or offset voltage adjustment mode, the selected bar (high voltage power supply module) moves on to the ion generation stop mode by pressing and button simultaneously for 2 s or longer and stops the ion generation.

Integrated Controller

Integrated Controller Slider Type EQFSH Series p. 8 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 9 How to Order p. 17 Specifications p. 18 Construction p. 20 Dimensions p. 21 Rod Type EQYH Series p. 36 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53