Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)

HRX-OM-O021

DO NOT k i id hi d l h b i d HRX-OM-O021 Chapter 1 Safety Instructions 1.3.4 Locations of Hazard Labels There are various warning labels on the product to show the potential hazards.

XL-OMV0002

A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11

Dedicated Controller

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

H B H Material: Carbon steel Material: Carbon steel Part no.

Air Slide Table Series MXQ

Weight g 65 65 25 15 15 B side traveling parallelism to A side Refer to Graph 1.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(ARP20/30/40) VEX SRH SRP Applications Applications SRF a Apply a constant pressure to fluid. b Adjust the blow-line pressure. Sensitivity within 0.2% F.S. allows more precise pressure adjustment.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(ARP20/30/40) IRV VEX SRH Applications Applications SRP a Apply a constant pressure to fluid. b Adjust the blow-line pressure. Sensitivity within 0.2% F.S. allows more precise pressure adjustment.

EXxx-OMN0035CN

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2 : : : 1, 2 3 1 2 3 4 -3No.EX-OMN0035CN-A / 1 1.5 *3) *3) 1 1 () -4No.EX-OMN0035CN-A () () () () -5No.EX-OMN0035CN-A /, , () * UL UL1310 Class2 0V -6No.EX-OMN0035CN-A * IP67 / *() ,, SI SI SI * IP67 M12M8 () -7No.EX-OMN0035CN-A CE , * 20-23 PLC PLC * -8No.EX-OMN0035CN-A , SI 1 SI 32 10 SI SI ON/OFF PNP

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

3

Specifications Model PFMC7501 PFMC7102 PFMC7202 Fluid Applicable fluid Dry air, N2 (Air quality grade is JIS B 8392-1 1.1.2 to 1.6.2, ISO 8573-1 1.1.2 to 1.6.2.)

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3652 & 4652 1.50 (38) 2.17 (55) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: 4T, 6T Connections: N, BRN Connections: 4, 6, BR 4 6 4 6 4 6 25.4 45 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70 (43.2) NPT 1/4

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

Solid State Auto Switches

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

HRL

POINT POINT POINT POINT When heating the circulating fluid, the high-pressure, high-temperature refrigerant gas is bypassed into the evaporator by expansion valve B to heat the circulating fluid.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.