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Note 3) Not used for 10 and 12. 15-16-9 10 Series ASR/ASQ Flow Characteristics Pressure Valve: Series ASR (Inlet pressure: 0.5 MPa) ASR430F ASR530F ASR630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 12 1000 15 300 4 8 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle

2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

)) Effective area (mm2) Effective area (mm2) 12 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-15 3 Series ASD Dimensions: Metric Size ASD330F/430F ASD530F/630F ASD230F Applicable tubing O.D. d Applicable tubing O.D. d L2 L3 M L2 L3 M D2 D2 L1 L1 L4 L4 H (Hexagon width across flats) H (Hexagon width across

06, 07 10 6 4 500 5 2 0 5 10 0 0 0 5 10 Needle rotation (Turns) Needle rotation (Turns) 4.1-14 Series ASD Dimensions/Metric Applicable tube O.D. d ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D.d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Metric L4 L5 A1 A2 M MAX.

10 0.3 MP 0.3 MPa 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MP 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0 10 20 30 40 50 60 70 0 20 40 60 80 100 120 0 20 40 60 80 100 120 10 20 30 40 50 60 70 0 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-25D1 2 MHL2-20D1 2 MHL2-20D MHL2-25D 200

Cylinder tube shape for 0.75, 106 K M1 O-counter bore R depth A + Stroke E 0.13 [0.16] Note 1) 2 sides x 4 places (Inch) C Symbol Bore 1/8"st 1/4"st 3/8" to 4"st A Z W R Q P O N M2 M1 K J I H E D 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.31 0.36 0.46 1.25 0.56 #10-32UNF 1.56 0.06 0.25 0.86 1.22 0.15 0.25 0.19 0.15 1.31 0.38 #10-32UNF 0.50 0.70 0.52 1.56 0.88 5/16-24UNF

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. 2.

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

From the intersection G, trace the arrow mark to obtain the intersection H on the vertical axis. 9. The intersection H is the amount of moisture included in the compressed air 1 m3 at 102 psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 3.0 g/m3. 10.

Multi-port Min. hole diameter A B C D E F G H J ZNC20 10 or less 8.3 or less 1 or more 10 or less 8.3 or less 1 or more 10 or less 2.5 or more ZNC30 8.3 or less 3.6 or more ZNC(40, 60) 11.3 or less 3.9 or more 11 or less 1.2 or more 11 or less 1.2 or more 11 or less ZNC80 16.8 or less 2.7 or more 15 or less 16.2 or less 4.5 or more 18 ZNC Series Specific Product Precautions 5 Be sure to

O.D. 7.8 VVQ100-3Aq w e Option Cover color: Ivory 1 2 Standard type DIN rail mounting 1 4 17 10 5 11 16 17 20 L 52 30 10 U side end plate assembly part no.

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

84 Series KB Piping Module 2 Air Supply Port Male connector socket: KBB H (Hex.) 8 10 14 19 T Connecting thread M5 0.8 M6 1 Rc(PT) Rc(PT) Weight (g) Part No.

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Set value L = Effective area H = Fixed hysteresis (3 digits) Vacuum Set value Window comparator mode Window comparator mode H H L P2 (n2) P2 (n2) H H L P1 (n1) P1 (n1) 0 0 ON 0 0 ON Time Time Normal mode output Normal mode output OFF OFF Time Time Reverse mode output ON Reverse mode output ON OFF OFF Time Time Caution: Motion differs only for remote controlled high accuracy pressure switch

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19