Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

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Series ZSE48/ISE4DB (mm) Dimensions Standard Type 4 M4X07 20 30 25 5 6 8 5 / dePlh 5.5 I ~i" ~1 I I I .. -# I f-ri: ~ It: ~\I I II 0 '" !~ \'\1 ~/I I~ j 'l OI :A(PT)Y. T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1..

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

Table of Contents

(A contact) N.O. (A contact) Number of auto switches N.O. (A contact) N.O. (A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Electric Actuator/Slider Type

7 A @7 !0 !6 A @6 !1o !5 @5 @4 !4 w A-A Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

CM2

1() 1() 2(0) 7 B 0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 o A !5 @7 A !0 @2 @4 @5 @6 !4 !3 A-A w * Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

One-touch Fittings

First, tighten the fitting by hand, then use a wrench appropriate for the hexagon flats of the body to tighten it a further two or three turns. For a tightening torque guide, see the table below. 6.

Air Cylinder NCA1 Series

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact P/A Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

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50 63 19.5 6 8 I 6.2 ZPT13g 1 3 15 12 5 21 8 6 21 8 6.2 27 32 7.5 3.8 12 3 1.8 mm Deep type ZPT16g 16 18 12.5 5 215 j 8 6 21 .5 8 6.2 275 12 3.5 1 .2 Model ;A > B C F:MS Xl F:M8XI25 F :~ E y Deep type ~mm ) 0 D D Model ;A ;B c F:M5XO.8 F :M6 Xl F: l> y ZPT40D 40 43 29 6 8 6.2 42.5 17 0 E G 0 E G 0 E G ZPT100 1 0 1 2 15 5 24 8 6 24 8 6.2 30 12 6 ZPT160 16 1 8 1 6 5 25 8 6 25 8 6.2 31 12

NCA1

HEAVY DUTY XTST CORROSION RESISTANT XTSS Bore Size 1.5~4 5 6 8 10 12 14 Barrel Barrel Stainless Steel Steel Std Std Std Std Std Std Std Composite Tube Optional Composite Fiber Opt Opt Opt Opt Opt Opt Opt Head/Cap Stainless Steel Head/Cap Steel Std Std Std Std Std Std Std Piston Aluminum Piston Aluminum Std Std Std Std N/A N/A N/A Tie Rods Stainless Steel Piston Steel N/A N/A N/A N/A Std Std

Air Cylinder

Also, use a mounting bracket to suppress vibrations when moving the cylinder body or when a cylinder is operated horizontally and fixed at one end at a high speed and frequency. 6. Do not apply excessive lateral load to the piston rod.

CM2

B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5

CL

CLAD40SCLA40, #6 (#1+#6+#11) CLAD50SCLA50, #6 (#1+#6+#11) CLAD63SCLA63, #6 (#1+#6+#11) CLAD80 SCLA80, #6 (#1+#6+#11) CLAD100SCLA100, #6 (#1+#6+#11) Trunnion/CLAT MXF MXW MXP MG MGP MGQ MGG MGC MGF (mm) CY1 Bore (mm) Stroke range (mm) W/o rod boot BN K KA LZ J AL BP BQ C GB MM B D GC B1 E GD F GL GA GR H1 A W/ rod boot 40 50 63 80 100 6 7 7 11 11 14 18 18 22 26 71 80 99 117 131 M14 X 1.5 22

Table of Contents

screw, use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN rail (Press and turn for the locking type.) 4(A) port side:

Fieldbus System

Output Unit 8 D side U side Station 7 6 5 4 3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch

Compact Manifold Regulator

A lead wire with connector (2 m) is included. ARJ AR425 to 935 ARX Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free specification is grease-free in the fluid contact area. AMR 6.

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.