Compact Hydraulic Cylinder Series CHKGB and Mounting Heights for Stroke End Detection 20 & 25 Proper auto switch mounting positions (mm) B D-F9 D-F9V D-F9W D-F9WV D-A9 D-A9V D-A9 D-F9 D-F9W D-F9BAL Bore size (mm) SMC D-A90 B 11 12 A 16 17 B 15 16 A 15 16 B 14 15 A 12 13 SMC D-A90 20 25 A Approx.
U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.
6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.
Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.
Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2
Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
When using as a stopper, select a model with a stroke of 30mm or less for bore sizes 20 and 25, and 50mm or less for bore sizes 32 to 100.
When using as a stopper, select a model with a stroke of 30mm or less for bore sizes 20 and 25, and 50mm or less for bore sizes 32 to 100.
Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.
1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)
1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2 ML2B C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20
At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.
0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
3-R1.5 2-4.5 through ( A , B , C ) 15.5 45 9 2 36 3 42h9 0 0.062 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ported: MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 11-5-10 10 Series MSUA Rotary Table
(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15
) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR