VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

VKF300

O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152

PSxx-OMV0003CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -36No.PS-OMV0003CN-G [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -37No.PS-OMV0003CN-G [F10] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series SY100 3 Port Solenoid Valve Rubber Seal

In case of DC) 34.5 (In case of AD) 9 R R (Lead wire length) 21.5 15.6 10 25 P P + + + + + 4-M5 X 0.8 (P/R port) 2-3.5 (Mounting holes) G, H: 30.1 Gl, Hl: 30.8 (In case of DC) L2 3 L1 31.8 (In case of AC) (Indicator light and surge voltage suppressor) (Station 1) (Station n) (Station 1) (Station n) A A A A 13 13 8.7 7.7 n-M5 X 0.8 (A port) 12.6 P=10.5 (Pitch) n-M3 X 0.5 (A port) 12.6 P=10.5

VCW

Base material Seal material NBR FKM EPDM PTFE NBR FKM EPDM PTFE Symbol Nil A B C G H J K VX2 10 10 stations C37 Refer to page 172-58/59 in the L dimension table regarding the maximum number of stations.

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

PSxx-OMM0006CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1= (A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 ( 1) -35No.PS-OMM0006CN-E [F 5] / / 0 <> [F 5] -36No.PS-OMM0006CN-E [F 5] / 5 ms ooo1 C_5 10 ms o.r1 () () ( ) OUT2 C_5C_5 C_5() EEPROM -105.0105.0 kPa -210210 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -37No.PS-OMM0006CN-E [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -38No.PS-OMM0006CN-E

PSxx-OMM0002CN

ON ON OFF OFF (/ /) 1 DC(+) DC(-) 2 ON DC(+) DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 5 (A/D ) 6 10 15 10 -45No.PS-OMM0002CN-F No. 80 mA () (Er1,2) (Er1,2) (Er0,4,6,7) "HHH" "LLL" (Er3) ( ) DC12~24V10% DC12~24V10% (Er0,4,6,7) 7 (HHH) (LLL) 10 () (Er3) DC12~24V10% DC12~24V10% DC(+) DC(-) 8 -46No.PS-OMM0002CN-F No.

2/3 Port Valve

P1 P2 P1 Air operated B A B A B A Pilot Solenoid Valve Specifications VX P2 Port size Pilot solenoid valve 6A to 25A 32A to 50A VO301-00 Grommet, Conduit, DIN connector Others(Option) VNA11 VNA12 SF4--23 VN P1 P1 Grommet, Grommet terminal Conduit terminal DIN connector External pilot solenoid Electrical entry VQ B A B A AC(50/60Hz) 100V, 200V, Others(Option) 24V, Others(Option) 15% to +10%

LECA6_C

L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Furthermore, when mounting supply/exhaust block assemblies on both sides of type B with a 2 to 10 station manifold, calculate the weight W using the formula for 11 to 16 stations.

Self-seal Fittings Series KC

D2 L1 L2 D1 M A (mm) M5 0.8 KCL04-M5 KCL04-01S KCL06-M5 KCL06-01S KCL06-02S KCL08-01S KCL08-02S KCL08-03S KCL10-02S KCL10-03S KCL12-03S KCL12-04S 16.7 18.4 18 8 10 8 12 14 8 10 8 23 17.4 25.1 29.1 27.1 1.9 1.9 6 11 7 13 21 16 24 37 29 38 63 81 4 10.4 25.3 1 8 24.2 20.3 19.5 27.5 19 29.5 30.7 32.7 21.5 34.2 37.2 38.7 44.3 2.3 2.3 2.2 2.2 M5 0.8 26.8 6 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 12.8

PSxx-OMU0005CN

ON ON (/ /) 1 OFF OFF DC(+) DC(-) 2 ON DC(+) DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 -69No.PS-OMU0005CN-C No. 5 () (A/D ) 6 ( ) 10~15 10 -70No.PS-OMU0005CN-C No. 80 mA (Er1,2) () ( ) DC12~24V10% (Er1,2) DC12~24V 10% (Er0,4,6,7,8,9) (Er0,4,6,7,8,9) (Er13) (Er13) No.18 7 "HHH" (HHH) "LLL" (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) -71No.PS-OMU0005CN-C No.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(non-locking) nRc(PT) 1/8 (port A) Applicable cord O.D. 4 to 6.5 A A P = 19 20 L: Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 7

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AIR CYLINDER

Since piston seal has a deep groove for sealing, use your hand (not a screw driver) and push from one side of seal and pull it out when it lifts off. 2. Grease . Seal kits : Apply thin coat of grease. . Cylinder component Apply grease to the individual component, shown in the table 10. The following amount is needed per one 100 stroke cylinder. STROKE or 100mm and more Table 10.

PSxx-OMU0008CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V 10% DC(+) DC(-) 9 ( ) 10 11 -73No.PS-OMU0008CN-D No. / 5m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -74No.PS-OMU0008CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -75No.PS-OMU0008CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -76No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () SUS630SUS304

AS-FPQ/AS-FPG

25.3 18.5 18 32.4 18 (14.3) (36.4) (31.4) 8 15.2 27.5 20.5 34.6 20 20 4 10.4 26.8 17 33 33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12