XL (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.
(C) 35 40 45 50 30 Outlet air pressure dew point (C) Ambient temp.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.
Stroke range (mm) Bore size (mm) AC AB AA N F M E L AP D K AE C J A AD B I G H AF 25 25 100 66 200 180 60 140 135 200 15 13.5 50 30 117 170 228 65 63 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 27 30 115 76 234 214 230 15 70 170 13.5 160 55 30 138 200 262 75 80 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 30 32 125 80 274 245 80 210 190 280 17.5
Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.
Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.
Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra
Double acting 32 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate
Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Indicator light Circuit with Light/Surge Voltage Suppressor DC circuit AC circuit Caution Indicator light Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) A() A [+] SOL SOL C(+) C ZNR Indicator light [] No polarity by adopting non-polar light. 4-14-22 23 Base Mounted Series VQZ100/200/300 Precautions Be
D-Y7GL Motor model Compatible driver model Power supply voltage (VAC) Motor output (W) + Brown lead wire MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 100/115 Main circuit of switch MSM022P1A 200 Output Black lead wire MSD023P1E 200/230 MR-C20A1 100/115 Mitsubishi Electric Corporation HC-PQ23 200 MR-C20A 200/230 SGDE-02BP 100/115 200 SGME-02BF12 Yaskawa Electric Corporation
0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200
210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2 L3 L4 4-14-14 15 Body Ported 3 Port Solenoid Valve (Manifold: Connector Kit) Metal/Rubber Seal, Body Ported, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 VV3QZ22Stations C Grommet (G) (5.5) (35) 2-4.5 mounting hole (11) 26 n-C4,
0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20
24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model
With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore
Judgement n = 1 + 2A + 2B + 3A + 3B = 0 + 0.32 + 0.10 + 0.42 + 0.12 = 0.96 CY1S CY1S CY1L M1, M3 [Graph 11] Allowable moment CY1H 200 CY1F 100 Moment M1, M3 [Nm] CYP CY1S20-Z B C D E 10 5 100 400 280 200 DPiston speed [mm/s] -X Load factors on the guides can be calculated with the SMC Pneumatic CAD system.
16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to