MXU

Note 3) ( ) in column W is the dimensions of D-A93.

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

ZCUK

Note 4) Figures in ( ) in the table W are D-A93.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Rotary Table

Load voltage Internal voltage drop (illuminated load current load when ON) range AC DC 24V or less 50mA Relay D-A90 AC DC 48V or less 40mA Not provided PLC D-A90V IC circuit AC DC 100V or less 20mA D-A93 2.4V or less (up to 20mA) 3V or less DC24V 5 to 40mA D-A93 Provided Relay (up to 40mA) D-A93V PLC D-A93V 2.7V or less AC100V 5 to 20mA 2.7V or less D-A96 D-A96V DC4 to 8V 20mA 0.8V or less

Series MXP Precision Air Slide Table

B Reverse the mounting direction A Reed switch D-A90(V), D-A93(V), D-A96(A) mm Auto switch mounting Switch operating range Stroke (mm) 20 45 25 51 31 Type 25 50.5 30.5 30 59 39 10 35 15 40.5 20.5 Caution A B A B A B MXP10 Tool for auto switch mounting MXP12 5 Use the screwdriver with grip diameter 5 to 6 mm when set screw (attached to auto switch) is set.

MXW Series Long Stroke Slide Table

24V With Grommet Diagnosis indication (2-Color indicaiton) 12V F9NWV F9NW 3-wire (NPN) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire PLC: Programable logic controller Lead wire length 0.5m " " (Example)A93 3 m " L " A93L Refer to page 177 to 179 for additional information on auto switches.

Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: A93 (A93--Reed, DC Volt, AC Volt, LED, Horizontal), Lead Wire: L (3m), Number of Switches, Mounting Position: A (2 pcs, Valve Open/Closed)

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

XG_-OMV0028

Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93

CEP1

(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

MXW

Lead wire length (m) Indicator light Load voltage Auto switch model Applicable load Pre-wire connector Special function Type Electrical entry Wiring (Output) 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line AC DC IC circuit 3-wire (NPN equivalent) A96 A96V 5 V Reed switch Solid state switch Grommet Yes Relay, PLC A93 A93V 12 V 2-wire 24 V 100 V F9N F9NV 3-wire (NPN) IC circuit 5 V, 12 V F9P

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

Smooth Cylinder Series CQSY

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Nil (Example) A93 3m .

MXH Series Compact Slide

(Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state switches marked with a " " are produced upon receipt of order.

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M