How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Individual exhaust spacer Gasket Spacer E M2.5 x 36 (2 pcs.)
Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.
0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.
Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .
W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95
Please refer to "Fig.1 Allowable lateral load applied to rod end ". ( Page 10) Table 2 Allowable kinetic energy CG5 N A Formula E= ( m/ 2 )v2 Bore size( mm ) E max ( J ) E max ( J ) 20 0.28 0.42 E Kinetic energy ( J ) m : Load mass ( Kg ) v Max. piston speed ( m/s ) 25 0.41 0.65 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max ( J ) Should be satisfied. 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 Warning
P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.
9 wyu e r i MH-A1006 MHKL2-J25 MHKL2-J25F MHKL2-J25S Order 2 pieces per one finger unit.
Please delete the unnecessary part. 32 Add 3mm to each A dimension of the standard style (double acting/single rod) on p.1.4-21. 40 1.4-82 World Wide QS\E Support... North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc.
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases
Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.
(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly
D 3 Set the test operation select switch to the Up Position, when performing the test operation mode by using set up software (MR ConfiguratorTM) E 2 F 1 0 (Note) This table indicates the status when the switch is set to "Down".
ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U
M10) Unitinch [mm] A B C D E F G H J K L M N P Q R 31.5 34.2 IDFB55E 2 1.4 [800] [868] 18.5 33.7 5.0 17.9 4.3 9.8 2 0.5 19.70.1 3.0 27.60.04 20.7 20.40.2 [470] [855] [128] [455] [110] [250] [50] [13] [5002] [75] [7001] [526] [5195] [36] 35.4 38.1 IDFB75E 2 [900] [968] IDFB Series 6-3 6-2 IDX-OM-W035 6 6-4 IDFB22E-11 IDFB22E/37E-23 R GFCI GFCI R GFCI R GFCI L N PE R TB1 PE N L 1 2 TB1
Under certain circumstances, the use of an electronic type pressure gauge is recommended. 22 0 0 43.5 58 72.5 87 101.5 Supply pressure (psig) 142 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Dimensions Dimensions Symbol A B C D E F G H J K M P Q R Model NARM1000 .18 .98 1.34 .83 .71 2.20 .63 .35 .71 .75 2.05 .35 .45 .19 (4.5) (25) (34) (21) (18) (