A

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 5.8 AIR PREPARATION MODULAR TYPE D I M E N S I O N S NAW 30004000 D I M E N S I O N S NAW10002000 With auto drain H N MODEL A B C D E F G J K L M P B Type NAW1000 25 109.5 50.5 25 26 25 28 30 4.5 6.5 40 2.0 20.5 28 86.5 Differential pressure NAW2000 40 164.5 78 40 56.8 30 34 45 5.4 15.4

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Connector C (Terminal no.) Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 1.5 3 3 5 5 8 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) A 10 B 15 Actuator side Controller side C 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Flow characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot 0.9 10-SS5YJ3-21P 10-SYJ323 1/8 M3 x 0.5 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 Base mounted for internal pilot 10-SS5YJ3-32P-M5 M5 x 0.8 C4 1/

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

MB

25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25 25 25 30 2 (Different sides or Same side) 15 C85 (n2) 2 (

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

ISO Standard Hydraulic Cylinder

S + Stroke M H CH2 CHA Stroke range Bore size (mm) MM A M MA C NA PJ D F NB SS G GA K P Y ZZ B E GB H J S V Z Related Products 32 25 to 800 18 15 46 18 12 23 25 14 35 7 1/4 60 45 33.2 M6 x 1 7.5 M14 x 1.5 56 5.5 153.5 30 12 43 103 128 40 25 to 800 22 19 51 22 12 32 25 19 37 3/8 62 63 41.7 10 73 6.5 185 9 34 18 47 128 153 M8 x 1 M16 x 1.5 D50 25 to 800 28 25 57 28 9 33 25 24 42 1/2 67 75 52.3

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G H K L M N P Q R T W W1 X Y1 Y2 Z Q2 Q3 Q4 10 29 22 29 14 40.004 0.016 9 0 0.036 1 7 9 0.5 16.5 9.5 18.5 M3 x 0.5 3.5 3.5 M3 x 0.5 10.6 19.8 35 31 25 17 41 15 34 25 29 18 50.004 0.016 12 0 0.043 1.5 6 10 0.5 19 10 18.5 M3 x 0.5 3.5 3.5 M3 x 0.5 12.6 21 35 36 29 21 48 20 42 34.5 30 20 60.004 0.016 14 0 0.043 1.5 8 10 0.5 25.5 13 25 M4 x 0.7 4.5 4.5 M5 x 0.8

Tie-rod Type Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 Specifications with included auto switch are the same for Double Acting/Single Rod.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

/3 (A/BEA/EB) Grommet Cv b C (dm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Actuation type Valve model Actuation type 1, 5, 3 L/M plug W M8 L/M plug W M8 1, 5, 3 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal (sbar)) Cv b C (dm3/ (sbar)) Cv b C (dm3/ (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 108 133 (sbar)) (sbar)) Single

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A Bore size (mm) 32 40 50 63 80 100 125 H 0.5 0 0.1 C DH7 FH11 L M N P 15 32.5 10.5 22 10 14 30 6.6 45 10.5 5.5 5 38 12 25 12 16 18 35 6.6 55 11 5.5 5 51 15 21 20 46.5 27 16 40 9 65 15 6.5 5 56.5 15 32 16 21 23 45 9 75 15 6.5 5 70 27 72 18 36 20 25 45 11 95 18 10 5 89 18 41 20 25 30 55 11 115 18 10 5 40 110 25 50 30 37 60 13.5 140 20 10 7 100 Black color 81 Series CP96/C96 Dimensions

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B F K A AL H1 C B N BN TT l 10.2 ZZ + l + Stroke h + l TZ TX H S + Stroke ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 25 to 500 25 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8

RHC

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6

MQQ

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

MQQ

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

0.4

(L4) (L3) L2 L1 27 P = 10.5 13.5 28 (5.25) Applicable connector: D-sub connector (25P) (Complies with MIL-C-24308) 63.5 <67.5> (12) 13 Indicator light Manual override 1.5 4.8 66 40.7 25 9.3 (5.5) (35) B A B A B A A A A B A 93.5 <100.4> 40.5 M4 mounting hole 2 35 [25] 61 Stations 8 7 6 5 4 3 2 1 n D side U side [ ]: 25 pins (top entry) C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp

Series VQ Base Mounted Metal Seal/Rubber Seal

Characteristic Cable length (L) Multicore vinyl cable 0.3mm2 X 25C Conductor resistance /km, 20C Voltage limit V, 1min, AC 65 or less 1.5m 3m 5m AXT100-DS25-015 Cable 25 core X 24AWG AXT100-DS25-030 10 1000 AXT100-DS25-050 Insulation resistance M/km, 20C 5 or more For other commercial connectors, use a 25-pin female connector made in conformity with MIL-C-24308.