Magnet: Built-in, Mounting: Double Clevis, Type: Standard, Bore Size: 25mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector
Magnet: Built-in, Mounting: Both Ends Tapped, Type: Standard, Bore Size: 20mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector
Magnet: Built-in, Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 25mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired
Magnet: Built-in, Mounting: Double Clevis, Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector
Magnet: Built-in, Mounting: Double Clevis, Type: Standard, Bore Size: 40mm, Port Thread Type: NPT 32-100 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Mounting
Magnet: Built-in, Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired
Magnet: Built-in, Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9BV--Solid State , Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired
Magnet: Built-in, Mounting: Double Clevis, Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number
Magnet: Built-in, Mounting: Double Clevis, Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector
Magnet: Built-in, Mounting: Double Clevis, Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 40mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Without built-in magnet, Support
Slit Valve The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
MY1M(W) MB 8 Mechanically jointed rodless cylinder MY1 Cam follower guide type With cover (W) is also available.
First tentative bore size determination W D 1.6 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)
With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.
9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.
Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.
x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.