Copper-free Actuators

M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free

80

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

Soft Start-up Valve AV2000/3000/4000/5000

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

ZR

Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc. 13-3-13 13 Series ZR Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

) (n = 2, 3, 4, 5) D-A9mV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) Band mounting D-C7m D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5

OMR0032

LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

HRX-OM-X084

) 20 *1 It is not possible to select only option D.

PSxx-OMH0002CN

M(DC500 V) 50 M(DC50 V) 1NPNPNP 2FKM -34No.PS-OMH0002CN-D ISE70() ISE75() ISE75H() (25 ) 2F.S. 3F.S.

End Lock Cylinder Series CBG1

Number of auto switches mounted Rod boot material Symbol Models 2 pcs. 1 pc. 70C00 Nylon tarpaulin J D-C7, C8 D-B5, B6 D-H7 D-G5, K5 110C Heat resistant tarpaulin K 15mm 10mm The maximum ambient temperature for the rod boot itself. 20mm 15mm D-B59W 20mm 10mm D-H7LF 3 Series CBG1 Rubber Bumper Type: CBG1BN With rear lock: CBG1BN Bore size Stroke H MM H GA GB Width across flats B1 2-Rc

SFOD-OMT0005CN

RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current

LECA6_C

LE C A 6 N A (DC24V) (LE ) LESH16RAJ-50BS-R16N1D 6 64 LESH16RAJ-50 I/O N NPN DIN P PNP 1 1.5m D DIN 3 3m 5 5m <> NPNPNP LESH16RAJ-50 NPN NPN 7 - 2.3 1 I/O LEC-CN5-* PLC 1 3 DC24V CN5 CN3 CN4 2 1 () LE-CA-* CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 3 50 200 50 200 3 3 CN1 DC24V <> AWG20 (0.5mm 2) USB A-miniB type USB LEC-W2

RS2H-OM0045P

D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm D-A9(V)

PSxx-OMM0006CN

WF1 ) M35L M45L A D A D M8(3),M8(3).

Title not found

atci resstance 5CMO or more ur'leitheleslvotage or 50oVDC Mega ibelw@lcase 6nd cab e) .wfisland volag. lcoovac ior l m n roFrnF ' d e ro.abdi . ndicalor igft LgftaloN .Ambienttemperalure 10-60:c D-Y7NW.Y7NWV/3wire Auto Switch Dimensions D-Y7NW ' D-Y7PW . D-Y7BW Operating range Mosl sensll ve position D-Y7PW.Y7PWV/3wire D-Y7NWV . D.YTPWV .

reduces flow setting time

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.