Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, EPDM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, FKM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, EPDM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, FKM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Brass Body, EPDM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Molded, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -

20 to 350 L/min2 L/min2 L/pulse30A340 g425 g

20 to 350 L/min2 L/min2 L/pulse30A340 g425 g

20 to 350 L/min2 L/min2 L/pulse30A340 g425 g

20 to 350 L/min2 L/min2 L/pulse30A340 g425 g

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

nozzle 900 400 KNL3-06-200 KNS-R02-110-8 KNL6-06-200 800 350 Flow rate [l/min (ANR)] Flow rate [l/min( ANR)] 700 300 600 250 KNS-R02-090-8 KNL3-06-150 500 KNL6-06-150 200 400 KNS-R02-100-4 150 300 100 KNS-R02-075-4 200 50 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] 15-7-5 6 Series VMG Dimensions VMG11/Piping

1

[mmHg] to [kPa]. 1 [mmHg] = 1.3332 x 101 1.3332 x 101 x 350 = 46.662 [kPa] Ex. 2) Convert the units of 80 [kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 x 102 [kgf/cm2] 1.01972 x 102 x 80 = 0.81576 [kgf/cm2] 16-13-13

Table of Contents

Vacuum Equipment Precautions . 349 350 350 352 353 354 359 359 359 360 360 360 361 361 361 362 363 366 369 370 370 371 374 375 377 379 381 383 385 387 389 391 393 395 397 399 401 403 405 405 405 406 407 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Vacuum Equipment

2/3 Port Valve

Rc(PT) Model Main port A B C D E F G H I J K L M VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 163 180.5 203.5 175.5 193 216 219.5 237 260 222.5 240 263 229.5 247 270 55 63 74 VX Flange/32F, 40F, 50F Port size Standard/Vacuum pilot VN VQ Pilot port Rc(PT) Model Flange M L K J I H G F E D C B A 310.5 326 350

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Indicator light Cover dia 1.5 Cross section 0.23mm2 R 3 1 P : AC 80 72.5 54.5 M plug connector (M) 56 61 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Indicator light 89 77 78 R 3 1 P : AC Equation L1=16n+11 L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

91.5 (Single) <92.5> 56.5 (Lead wire length) 58 <63> 300 1 P 61.5 <62.5> Cover diameter 1.5 Cross section 0.23mm2 R1 R2 5 3 73.5 1 P Indicator light R1 R2 < >: AC 5 3 Equation L1=16n+10 L2=16n+20 n: Station (Max. 20 stations) Dimensions 2 42 52 75 85.5 L n 3 58 68 87.5 98 20 330 340 362.5 373 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Cover dia 1.5 Cross section 0.23mm2 R 3 1 P Indicator light Applicable cord O.D. 3.5 to 7 90.5 83 : AC R 3 1 P M plug connector (M) 300 (Lead wire) 92 80(81) 77(78) Indicator light Cover dia 1.5 Cross section 0.23mm2 66(71) R 3 1 P : AC Dimensins n: Station (Max.20) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350