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point: 40C), IDG75S (Standard dew point: 60C) IDG100 (Standard dew point: 20C), IDG100H (Standard dew point: 15C) P1 = 0.3 MPa 0.06 0.02 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.016 P1 = 0.5 MPa 0.04 P1 = 0.7 MPa 0.012 P1 = 0.7 MPa 0.008 0.02 0.004 0 100 400 200 300 0 400 800 1200 1600 Inlet air flow rate (l/min (ANR)) Inlet air flow rate (l/min (ANR)) IDG100L (

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

MGP

-250 MGPA80-250 0.4 0.25 MGPA80-200 MGPA80-200 MGPA80-150 MGPA20-200 MGPA20-200 MGPA80-150 0.2 0.3 MGPA20-150 MGPA20-100 MGPA20-150 MGPA20-100 0.15 MGPA80-100 MGPA80-100 0.2 0.1 MGPA20-50 MGPA20-50 MGPA80-50 MGPA80-50 0.1 0.05 0 0 0 20 40 60 0 50 100 150 200 Horizontal load N Horizontal load N MGPA25 MGPA100 0.6 0.7 0.5 0.6 MGPA25-400 MGPA25-400 MGPA100-400 MGPA100-400 Plate displacement

Table of Contents

MHS2-50D MHS2-50D D400 400 F Pressure 0.6 MPa Pressure 0.6 MPa 20Internal grip Gripping force (N) 300 300 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 200 200 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 0 0 20 20 40 40 60 60 Gripping point L (mm) Gripping point L (mm) MHS2-63D MHS2-63D Pressure 0.6 MPa Pressure 0.6 MPa 600 600 0.5 MPa 0.5 MPa Gripping force (N) 0.4 MPa 0.4 MPa 400 400 0.3

HRS100/150

Pipe thread type Note 1) 400 V type is provided with an earth leakage breaker with handle (-B1) as standard.

energy saving effect

IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option.

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

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Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

Air Slide Table

: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

C95

, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Made to Order

But, for MGQ80, 100 and MGP80, 100, it will be 50 to 400 mm/s. 50 to 200 mm/s for the MK series. The piston speed for the CY3B series is 50 to 400 mm/s. Note 5) Please contact SMC for the CQ2, CQS, MGP and MGQ series with rubber bumper.

Compact Guide Cylinder

mm/s L = 100 mm, V = 400 mm/s 3 3 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 2 2 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 22 MGPK Series Operating Range when Used as a Stopper Bore Sizes 12 to

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

Lightweight and Compact

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

CY1

, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

IDG

point: 40C), IDG75S (Standard dew point: 60C) IDG100 (Standard dew point: 20C), IDG100H (Standard dew point: 15C) P1 = 0.3 MPa 0.06 0.02 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.016 P1 = 0.5 MPa 0.04 P1 = 0.7 MPa 0.012 P1 = 0.7 MPa 0.008 0.02 0.004 0 100 400 200 300 0 400 800 1200 1600 Inlet air flow rate (l/min (ANR)) Inlet air flow rate (l/min (ANR)) IDG100L (