Table of Contents

-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

5

7 (two), !8, @0 140 CS2Y140AA-PS 5 Piston rod Carbon steel Hard chrome plating 6 Bushing Oil-impregnated sintered alloy 160 CS2Y160AA-PS 7 Tie-rod Carbon steel Zinc chromated 125 CS2Y125AR-PS With single-side cushion Consists of !6, !7 (one), !

KJ

Note) D: Max. diameter VMG Union Y: KQ2U Min. port size 2.5 3 3.5 4.6 6 7 Applicable tubing O.D.

HRX-OM-X037

Alarm Notifications and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Operation of this product when an alarm occurs . 7-1 7.3 Troubleshooting . 7-2 7.3.1 Alarm contents, causes, and troubleshooting . 7-2 7.4 Other Errors . 7-5 HRL Series HRX-OM-X037 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection

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FRANKLIN ROAD, INDIANAPOLIS, IN 46226 TEL: 31 7-899-4440 FAX: 31 7-899-31 02 For a branch office near you call: 1800-SMC-SMC1 (762-7621\ July 1998 Specifications subject to change without notice.

Vacuum

u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR Series ZPT Serles ZPY eAdaplor

Vacuum

u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR Series ZPT Serles ZPY eAdaplor

Air Cylinder CP Series Cylinder Positioner Assembly

z 1 . 7 a x.43 o 1 ) 2.24 (58) M26x1.51 5 7 a40) c 9 8 125\ 4.96 (126\ 1.42 140 l;$?'

Air-hydro Unit

Conditions: Operating pressure 0.5 MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1 m AS500-06 AS420-02/03/04 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load CC CC Load ratio Load ratio Refer to Best Pneumatics No. 7 for the details of speed controllers.

Brake mechanism added

Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Caution on Pneumatic Circuit Design Air balance Unlike the current pneumatic cylinder that performs a simple reciprocal movement, the stroke reading cylinder with a brake also makes intermediate stops.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

VXD21/22/23

How to Order (Normally Closed) VXD21 0 VXD22 VXD23 Bracket Nil B None With bracket VC Thread connection sizes are available from 02 to 10. Model Electrical option Nil S L Z VDW None With surge voltage suppressor With indicator light With light/surge voltage suppressor Body size 3 4 5 6 7 8 9 VQ 10A 15A 20A 25A 32A 40A 50A VX2 Refer to the table (2) given below for availability.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

PF2A/PF2W

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

Digital Flow Switches, Series PF2A, Series PF2W

Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Set flow rate range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Minimum setting unit Note 1) 0.05l/min 0.1l/min 0.5l/min 1l/min Accumulated pulse flow rate exchange 0.05l/pulse 0.1l/pulse 0.5l/pulse

IZN10_C

( ( ( ( ) ) ) ) IZN10-01/IZN10-02 / M3X0.5 4 () 2xM3x0.5 10 -20- 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. ! ( ( ( ( 2 2 2 2 ) ) ) ) LED , , , -21- 7 7 7 7-2. 2. 2. 2. 7-2-1. 7-2-2. 3-1 Assy Assy Assy LOCK ! -22-

CEx-OMQ0010

CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()(