Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident.
Never use in an atmosphere of explosive gases. The structure of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in an area where a magnetic field is generated. Auto switches will malfunction or magnets inside cylinders will become demagnetized.
Furthermore, an abnormal temperature rise due to adiabatic compression can cause tubing to burst. Note 3) The minimum bending radius indicates the value at a temperature of 20C (68F) with an outside diameter rate of change of 10% or less. At higher temperatures the outside diameter rate of change may exceed 10% within the minimum bending radius.
Furthermore, an abnormal temperature rise due to adiabatic compression can cause tubing to burst. Note 3) The minimum bending radius indicates the value at a temperature of 20C (68F) with an outside diameter rate of change of 10% or less. At higher temperatures the outside diameter rate of change may exceed 10% within the minimum bending radius.
Furthermore, an abnormal temperature rise due to adiabatic compression can cause tubing to burst. Note 3) The minimum bending radius indicates the value at a temperature of 20C with an outside diameter rate of change of 10% or less. At higher temperatures the outside diameter rate of change may exceed 10% within the minimum bending radius.
Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility
For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.
For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.
10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !
Refer to the Auto Switches Precautions (Web Catalog) if using with an auto switch. 10. Risk to people with pacemakers The product has a magnet inside. It may interfere with the use of an electronic equipment such as a pacemaker. People with pacemakers should stay away from the magnet gripper or take safety measures to block the magnetic force. Caution 1.
Install an earth leakage breaker*1 suitable to each model for the power supply. Maintain a voltage range within 10% of the rated voltage. (Do not use this product with continuous voltage fluctuations.) *1 Select an earth leakage breaker with a leak current sensitivity of 30 mA. Regarding the rated current, refer to the Applicable Earth Leakage Breaker Capacity.
11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.
to 63 20 20 CLQ 63 MLGP 50 RLQ 50, 63 50, 63 Load weight m (kg) 50, 63 MLU 10 10 50, 63 40 40 40 40 ML1C 50, 63 40 D40 -X 32 32 32 32 32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25
50 50 Load weight m (kg) Load weight m (kg) 40 40 50 50 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10
If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute. Internal voltage drop Voltage reduction across an internal device when the switch output is in the ON condition. O Operating fluid temperature Range of fluid temperature that can be used by the product. Operating pressure range The pressure range in which the product can be used.
The load should be applied to the piston rod in an axial direction.
The load should be applied to the piston rod in an axial direction.
Example) Assume circuit C with an operating pressure of 0.5 MPa, load weight of 10 kg, fluctuation to 20 kg and a cylinder bore of 32 mm.
) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated