Rotary Table

When the rotational axis and load center of Rectangular parallelepiped) Position of rotational axis: Perpendicular to the plate through the center of gravity gravity are not consistent L 2 r I = K + mL K: Moment of inertia around a b the load center of gravity 2 2 b a + 2 r I = m 12 4.Round plate K = m2 9. Gear transmission 4.

RB/RBL/RBQ

Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

VCB

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

VXZ

Refer to page 17-3-65 for ordering a coil only.

Sine Rodless Cylinder Series REBR Direct Mount Type

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment (Nm) Moment (Nm) Moment (Nm) REBHT25, 32 REBHT25, 32 REBHT25

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Peltier-type Chiller Thermo-con/ Compact Type

Noise Level Sound level Noise level reference Sound example 20 dB Whisper The sound of leaves touching each other or the sound of snow falling Suburbs late at night or the sound of writing with a pencil 30 dB Very quiet 40 dB A quiet residential area in the daytime or in the library HEF002 Noise level range External unit of a home air conditioner (close distance) or in a quiet office 50 dB

LV50-OMQ0002

1/2(15 A) 3/4(20 A) 1(25 A) Weight(Body) *8 Approx. 340 g Approx. 400 g Approx. 520 g Approx. 680 g *1: Refer to page 66 [Applicable fluids list]. *2: 0L/min is displayed when the flow is less than zero-cut flow. *3: When fluids with high temperature are used, the available pressure range will be reduced.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

PFxx-OMP0001CN

B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min PFMB7202 20 L/min 2000 L/min PFMB7501(500L/min) PFMB7102(1000L/min) 200 kpa [kpa] [kpa] 200 kpa 400 kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501

Plate Cylinder with Lock Series MLU

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

ZSE30A(F)/ISE30A

Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.

3 Position Cylinder Series RZQ

M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

Soft Start-up Valve

CAT.ES40-63A AV2000-A/3000-A/4000-A/5000-A Series Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series Improved flow rate characteristics *1: Up to 2.3 times 2(A) C[dm 3/(sbar)]: 9.2 Fill time: Up to 50% shorter (P)1 3(R) *1 For high speed air supply C[dm 3/(sbar)] Body size AV-A Current model Low speed air supply High speed air supply Pressure in the tank New New 20 9.2 4 AV2000-A Current

MLU

HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

LJ1H102PB-K 100W to 600 Non-standard motor LJ1H102NB-K 100W to 600 Matsushita Electric Industrial Co., Ltd.