VHK

-12F VHK-03S-06F VHK-03S-08F VHK-03S-10F VHK-03S-12F VHK-04S-10F VHK-04S-12F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 24 Series SYJ500 Type

End Lock Cylinder Series CBG1

With Mounting Brackets Axial foot type/CBG1L Foot type (mm) With rear lock/H With front lock/R With double locksW Bore size (mm) ZZ LS ZZ LS LS ZZ With rod boot With rod boot Without rod boot Without rod boot With rod boot Without rod boot 142 + l 141 (149) + l 153 + l 20 57 68 121 (129) 122 56 (64) 133 149.5 + l 148.5 (156.5) + l 160.5 + l 25 57 68 126.5 (134.5) 127.5 56 (64) 138.5 149.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Escapements Series MIW/MIS

D-F9NW, F9NWV DC (+) Brown Main switch circuit Auto Switch Weights OUT Black Unit : g Model D-F9NW(V) D-F9PW(V) D-F9BW(V) DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l Slotted screw DC () Blue Indicator light 2.7 2 D-F9BW, F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main switch

Turntable Cylinder Series MGT

M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

2-UA, thread depth UB (mounting threads) Q 4.5 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth 2 4-M4 x 0.7, thread depth 8 Attachment mounting threads CB CA M5 x 0.8 (finger opening port) Open EO Closed EC 9 L J M5 x 0.8 (finger closing port) G I 2 (mm) RB 25 28 I 6 7 Model MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56

e-Rodless Actuator

D-F9NW/F9NWV DC (+) Brown Switch main circuit Switch main circuit OUT Black Weight Table Unit: g DC () Blue D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch part no. 0.5 7 7 7 Lead wire length (m) 3 34 34 32 D-F9PW/F9PWV 5 56 56 52 DC (+) Brown Dimensions Unit: mm OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw DC () Blue Indicator light 2.7 2 D-F9BW/F9BWV 22 2.8 2.6 OUT (+) Brown 4 Switch

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5 14.5 Section AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102 40 30 65 MXP16-20B 42 50 119 108 70 30 128 56

Series MXP Precision Air Slide Table

4-M50.8 Bottom hole diameter 5.1 7 deep 30 19 6.5 A W 320.05 0.50.05 8 D B Piping port 2-M50.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M20.4, 3 deep For magnet mounting 2-M30.5, 3.5 deep 8 For rail mounting 10.7 8.5 6-M50.8 20 20 7 deep L (mm) Model G H J K L M S V W Z MXP16-20 18 58 93 40 36 40 20 82 65 102 MXP16-30 28 70 119 50 42 56

MXW Series Long Stroke Slide Table

0.7 thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Multistage Ejector (N)ZL Series

Exhaust with silencer Vacuum adapter1/8 2-5.4 Mounting hole 7 P With vacuum adapter (N)ZL112-GN V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting Vacuum port One-touch fitting 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56

3 Position Cylinder Series RZQ

6.6 4 107.7 82.5 66.5 32 Special cap bolt 33 18 6.6 4 92 76 117.2 40 39 22 9 5 96.5 73.5 126.7 50 LY 46 102 28 11 5 76 138.2 63 LH Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG LZ LX 4-LD 57 57 71 11.2 5.8 32 A + Full stroke 64 64 78 11.2 7 40 79 78 95 14.7 8 50 95 91.5 113 16.2 9 63 Front flange type/RZQF Flange (mm) FV M Bore size (mm) AR AH B FD FT FV FX 100.5 108.5 82.5 5.5 56

5 Port Solenoid Valve, Series VQC

KG RKT5-56 Input connector: M12, 5 pins (receptacle) Cable side connector example: OMRON Corporation XS2G 2-input block (EX250-IE1) 4-input block (EX250-IE2) Function Description No. Function Description No. Drain/Shield Drain 1 (+) Sensor power supply SW+ 1 3 1 2 2 (+) Circuit power supply V+ 2 5 2 Open N.C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38 45 56 6 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control

Multistage Ejector Series ZL

Mounting hole 7 With vacuum adapter ZL112-GN P V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure

AC Servo Motor Driver (CC-Link Type)

. 47 5.6.2 Motor speed Configuration . 48 5.6.3 Acceleration/deceleration Time Configuation . 49 -1- 5.6.4 Move distance Configuration and Operation . 50 5.7 Positioning (Point Table) Operation using the Setup Software . 51 5.7.1 Point table List . 51 5.7.2 Point table Data . 52 5.7.3 Point table (Target position) Configuration . 53 5.7.4 Point table (Servo Motor Speed) Configuration . 56