Guide Table Series MGF

) 73 146 6 Series MGF Dimensions 100 MGF100 Scale: 35% 4-M12 x 1.75 through 170 200 160 11.5 53.5 + Stroke 10 65 + Stroke 20 9 2-Rc 1/4 port for extending cylinder When the cylinder is extended Breathing hole for guide (with element) 46 Port for retracting cylinder 4-M12 x 1.75 through M6: T-slot for hexagon bolt K 70 4 170 200 190 11 6-K (6 places) 93 186 7 Solid State Switch Connections

HRX-OM-W038

(Optional accessory: DI filter set: HRS-DP001) 6.3 Option T [High-pressure pump] 6.3.1 Option T [High-pressure pump] With option T (high pressure pump), the discharge pressure is raised. The high head pump uses a mechanical seal. Thermo Chiller makes AL28 alarm when driving time is passed a recommended preventive maintenance hours.

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 Size PAX C D, T G, C T

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

ARM10/11

Material Description Description q w e r t y u i o !0 !

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

ARM10/11

Material Description Description q w e r t y u i o !0 !

Micro-Mist Separator with Prefilter Series AMH

---t;F=f=='Tjt IN Bracket (Option) N ...'---Ht-t---t-+-H I--i IN o I w c.

10

1 u w e t y i o !2 No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Fluoropolymer Piping Equipment

-T-R10 LQ1E22-T-R11 LQ1E31-T-R1 LQ1E31-T-R2 LQ1E31-T-R8 LQ1E31-T-R9 LQ1E32-T-R1 LQ1E32-T-R8 LQ1E32-T-R9 LQ1E32-T-R10 LQ1E41-T-R1 LQ1E41-T-R2 LQ1E41-T-R3 LQ1E41-T-R8 LQ1E41-T-R9 LQ1E51-T-R8 LQ1E61-T-R1 8 x 6 10 x 8 12 x 10 6 x 4 8 x 6 10 x 8 12 x 10 8 x 6 6 x 4 12 x 10 19 x 16 6 x 4 10 x 8 12 x 10 19 x 16 10 x 8 8 x 6 6 x 4 19 x 16 25 x 22 25 x 22 19 x 16 Body size (according to the combination

RSH/RS1H

9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

RSH/RS1H

200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N

4/5 Port Air Operated Valve Series SYJA3000

Type 40 (5 Port/Base mounted) How to Order SS5YJ740 05 01 P port 1/4 Thread type Stations 01 1/8 A, B port size Nil F N T 02 Rc G NPT NPTF 2 stations : : R port 1/4 20 20 stations Applicable solenoid valve SYJ740SYJ743A, B port Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

2/3 Port Valve

T Conduit terminal See table 1 below for applications.