Compact

B 2 x 4 x Square nut M5 x 0.8 LER 8.5 5.5 (105) 105 Stroke LEH [Origin]Note 1) Origin Note 2) Origin Note 2) When LECP1, LECP6 or LECPMJ is used. 3 5.3 When LECP2 is used. When LECP2 is used.

5 Port Solenoid Valve

B B B 61 106 107.8 9 9 29.5 VQ 1/2 80 A A A A A 192.8 R1 5 R2 3 179 179 155 VQ 4/5 1 P PE VQC 1/2 29.5 B B B B B VQC 4/5 VQC 4/5 12 21 47.5 VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port VFS 1/2" 3(R) port 3/8", 1/2" 4(A), 2(B) port VFR M5 x 0.8 Ground screw VQ7 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.7 3 1 69 55.5 53.7 45.5 12 X 4 A 4 A 4 A 4 A 4 A 4 A

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D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

Power Valve Precision Regulator

Body size Port size Port M5 01 Nil M5 01 1(P), 2(A), 3(R) M5 IR-A A Body ported 8 1 Without sub-plate M5 IR Base mounted B Position for port P1 8 1 IRV 3 VEX1 3 10 G 5 VEX VEX SRH Regulator valve Option Bracket Foot Pressure gauge Silencer for bleed port Dimensions of port P1 B F G SRP Type Precision regulator Operation Air operated type Manual knob type Fixed orifice SRF

E-P HYREG ® Series VY1

(Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

Bernoulli Gripper

Attached O-ring Model Size ZNC20m 5.8 x 3.8 x 1 Side ported B-B Air supply port PC B Air supply port PA O-ring O-ring Multi-port Plug B Air supply port PB Requires no piping (Body ported) Side ported If the steel ball is not visible the multi-port is on the left and the air supply port PB is on the right, the air supply port PA is plugged.

RSQ

, Chamfered, Roller 0.74 0.80 0.86 Double acting with spring loaded REC 40 Model C 5 D 40 48 53 55 60 65 60 65 70 75 80 85 75 80 85 Mounting bolt M3 x 45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20

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Hs B A B A 13 Series CM3 Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto Switch Proper Mounting Position (mm) Auto switch model D-A3lA D-A44A D-G39A Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore size A 20 25 32 40 10 9 6 5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5

Intrinsically Safe Valve

x 0.8 (Pilot EXH port) Manual override 4 x 4.5 (Mounting hole) 125.6 42.2 EB P EA A A A A X PE 26.6 26 21 21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector

Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

VQ5000

pilot port) With connector on D side (FD) 12 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram With connector on U side (FU) 106 46.8 59.2 83.5 9 9 55.5 M5 ground screw 2n-1/2 (ports A, B) 34.5 n U side X 12 B 2 A 4 6 B A B 2 A 4 5 SMC SMC SMC SMC SMC B A B 2 A 4 4 B A P=41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1 B A 58.5 X 12 Stations

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

pilot port) With connector on D side (FD) 12 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram With connector on U side (FU) 106 46.8 59.2 83.5 9 9 55.5 M5 ground screw 2n-1/2 (ports A, B) 34.5 n U side X 12 B 2 A 4 6 B A B 2 A 4 5 SMC SMC SMC SMC SMC B A B 2 A 4 4 B A P=41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 B 2 A 4 1 B A 58.5 X 12 Stations

KG

(mm) <M5> Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 8 10.4 13.4 22 16 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.

Low Friction Cylinders Series MQ

x 0.8 10 depth of counterbore 1.5 C M D I L B 2 x OA effective depthRA 2 x N through A 10, 16, 20 REA M5 x 0.8 F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA REB REC I C 4 x N through CY 0.2 D E CX M MQ RHC L B 0.2 M E A RZQ (mm) Bore size (mm) D Note) DM N OA OB RA RB A B C E F I L 4 41 38 SR3 4 9 22 3 16 3.2 M3 x 0.5 6 -X 6 18 3.2 M3 x 0.5 6 41 38 SR5 6 9 24 3

Modular Type Regulators Series AR

Symbol 10 20 25 30 40 50 60 Body size Description Nil K Note 1) Without backflow function With backflow function With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) a Without mounting option With bracket With set nut (for panel fitting) Mounting H + Nil E Without pressure gauge Square embedded type

3 Port Air Operated Valve

) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x

Series KP/KPQ/KPG

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21