SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Confirm that E1 + E2 E E1 + E2 = 2.25 + 0.27 = 2.52J Since E = 3.7J, E1 + E2 E Therefore, the cylinder cushion is available for use. 21 Series CHN Technical Data 3-2 Maximum Absorbed Energy Chart & External Force and Energy Conversion Chart at Cushion Seal Contact Point Maximum absorbed energy pressure and chart in terms of cushion performance characteristics Be sure to keep the combined

SYJ300

: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable M: Common exhaust for the pilot and main valve + + + + D: Push-turn locking slotted type R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

Wedge Cam Operation Provides

7 e w o Fingers open Normally open !9 t y !5 i u !6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

10

0 r !1 u w e t y i o !2 No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

XLAQ/XLDQ

r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

With Factory Installed

~ ( 0 '" co; Port size 1/8' 1/4 Gauge '" U'" ~N Drain 45 40 M5 X O .8 With differential pressure type auto drain Optional Specification yJ Metal bowl 45 IN-OUT reversal mounting (-R) specification 9 Filter I Regulator Series AW it (mm) AW3001 .

IDX-OM-W029

GFCI 5. 6. 7. 10-2 IDU22E/37E/55E-23-R 10A 30mA IDU75E-23-R 20A 30mA IDU22E/37E/55E-30-R 10A 30mA IDU75E-30-R 15A 30mA IDU Series 10-1 10 1 IDX-OM-W029 10 R 10-3 1) 2) 3) M5 9.5mm 2 1.25mm N L L ,N () 6.5mm () Connect to earth cable GFCI Connector width AC230V 6.5mm or less M5 Electrical entry 9.5mm 2 1.25mm L01,L02,L03 L01 L02 L03 L1 L2 PE L3 () M3 () 6.5mm

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

-H -R -W N L Bore size Stroke Axial foot: CBM2L CL MLGC -H -R -W N L -H -R -W Front flange: CBM2F Bore size Stroke Rear flange: CBM2G Bore size Stroke N L CNA CB CV/MVG CXW -H -R -W N L Bore size Stroke CXS Single clevis: CBM2C CXT MX MXU MXS -H -R -W N L Bore size Stroke Double clevis: CBM2D MXQ MXF MXW MXP MG Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

PSE530/200

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

IDX-OM-W026

12 R 12-1 12-2 1 AC100V AC200V INOUT IDF22E/37E/55E-**-R 10A 30mA IDF75E-**-R 15A 30mA IDF Series 12-1 12 1 IDX-OM-W026 12 R 12-3 L01,L02,L03 M5 L03 L02 L01 9.5mm 2 1.25mm () L ,N N L () () M5 () 9.5mm 2 1.25mm M4 () (M3) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Table of Contents - Tubing

Align the cutter with the cutting groove and cut the holder. w Cut the multiple tube holder at a desired position and mount it on the equipment with the attached phillips countersunk tapping screws. e Align the tube with the holding position and push down to fit it into the holding part. r Pull up a tube to remove it from the holder. Model Number of tube (Max.)