VQ

2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 101 87 9 111 97 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 2.9-13 Series VQ100 Construction R A P (N.C. valve) Component Parts Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Corbon steel NBR No. q w e r t y u i Solenoid coil

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

Rotary Table

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 29 - Kinetic energy Table 10 shows the allowable kinetic energy of the rotary table. Here, the angular speed can be found from the formula below.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Speed Controller: Standard Type Series AS In-line Type 1

Description Material Note q w e r t y u i o Brass Brass Brass Brass Brass HNBR Brass NBR NBR Body B Body Needle Lock nut Handle U seal Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated AK ASS ASR Electroless nickel plated 4.5 x 3 x 0.75 2.2 x 0.8 x 0.7 Needle guide O-ring O-ring ASF Construction: AS1000-M5 Component

XLAQ/XLDQ

t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Rotary Table

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 () () 1) CIR-R CIR-L 1 2 34 (5) SYN-I Area 1 Step No.

IDX-OM-W053

(1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

MHL2

8 Sainless steel Rack r Oil containing polyacetal with back metal Bearing !

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

GA342

8.4 NO X X PE NC 30.5 30.5 116.1 98.6 91.6 91.6 2(A) 3(R) 66.8 57.6 1(P) 43.8 43.8 34 34 71 (P port) Rc 1/2, 3/4, 1 (R port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 5-5-12

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

-H -R -W N L Bore size Stroke Axial foot: CBM2L CL MLGC -H -R -W N L -H -R -W Front flange: CBM2F Bore size Stroke Rear flange: CBM2G Bore size Stroke N L CNA CB CV/MVG CXW -H -R -W N L Bore size Stroke CXS Single clevis: CBM2C CXT MX MXU MXS -H -R -W N L Bore size Stroke Double clevis: CBM2D MXQ MXF MXW MXP MG Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Nil Left R Right D Both left and right LEC LEC S *5 Select D for the vacuum port for suction of 50 L/min (ANR) or more. LEC SS-T R: Right !1 I/O cable length [m]*10 o Cable length [m]*6, *9 LEC Y Nil Without cable H Without cable (Connector only) 1 1.5 *9 The length of the encoder, motor and lock cables are the same.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -