1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

Compressed Air Preparation Filter

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2

Series VQ Base Mounted Metal Seal/Rubber Seal

kit r AXT100-2-TB2 (4) Terminal block assembly (8 terminals) T kit t VZ Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PS20) of q SI unit and w P kit (20 pin).

Title not found

a a o a a a a a a a a o a a Parallel Gripper Series MHZA(J)2 Compact Body o6mm Bore 2 2 MHZAJ T With dust cover I Dust cover Number of fingers m bore 06m dy option ffi i SinSle-acling only ' E and K ophon wilh basic lngers only on SMC Now Prooram Paraffel Gripper Series MHZJ2 t Number of fingers -IE 2 T MHZJ "*" ",r" J I Number of auto switches Auto switch model Fefer to page 4572.010 tor

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

a M GB V Cushion adjustment screw Air release 4-J R (max.)

LEC-OM02704CN

X E T X ( ) * S T X E T X ( ) 6 =A =A (2) 10 S O H S T X E T X ( ) S T X E T X ( ) * 6 ( ) (3) EOT neutral EOT () E O T () (4) o r o r 1 2 or 16 4 8 14 5 14 14.3.2 (1) 16 (ASCII) () SOH STX ETX EOT 01H 02H 03H 04H start of head() start of text() end of text() end of transmission() ctrlA ctrlB ctrlC ctrlD (2) ASCII b8 0 0 0 0 0 0 0 0 b7 0 0 0 0 1 1 1 1 b6

C95Series

. __ I -='.1' .J.. ~ ~ _.

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Cylinder

---J Nil --Without auto switch 9O---D-90(O.5m lead wire) B Nose mount I I I T.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

10

J Nylon tarpaulin 70C K Heat resistant tarpaulin 110C* * Max. ambient temperature for rod boot itself. Water Resistant Air Cylinder Mounting Brackets/Part No.

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Lightweight and Compact

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 74 C O N T E N T S HRS090 Series Standard Type HRS HRS

Cylinder with Lock Series CNS

M GB GA FA 4-J 4-FD Rc(PT) BP Unlocking port 2-Rc(PT) P Cylinder port GL GR G G Width across flats KA MM Q D EA E FY BF V FT VA AL A K F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Long strokes Rc(PT) BQ Plug with breathing hole BC element M GA T 4-J Width across flats KA 2-Rc(PT) P Cylinder port G G Rc(PT) BP Unlocking port GL GR GB 4-FD FA

CM2

auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.