Precautions 1

MM ND hole Shaft ND hole H10 ND hole H10 MM MM Shaft d9 Shaft d9 NX2 L R2 U2 A H Z E1 E1 NX NZ L NX NZ L (Min.) A1 U1 L1 A A1 U1 L1 A Applicable cylinder bore size 20 ND E1 L L1 MM A A1 H L MM ND NX2 R2 U2 Y Z A Part no.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With

Rotary Cylinder Series MRQ

The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1)/t L /min(ANR) V : Inner volume = cm3 P : Absolute pressure = {Operating pressure (MPa) + 0.1} t : Operating time = s Calculate the required air volume separately for the linear motion part and the rotary motion part.

Rotary Table

*Side ports are all M5. Number of auto switches Nil 2pcs. s 1pc. n npcs. Applicable Auto SwitchesRefer to the website catalog for detailed auto switch specification.

45

AXT100-DS25015 030 050 L Terminal no.

CRQ2

Tf = F x l (Nm) Load : Angular acceleration g = 9.8m/s Load 2 = (rad/s) Lever t : Rotation angle (rad) t : Rotation time (S) Shaft axis Rotary actuator 12 Step Step 2 Consider the impact at the end of the rotation. 3 Consider the allowable shaft load. 1.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Auto switch mounting screw M5 x 0.8 x 16 L Auto switch Hexagon socket head set screw M4 r Hook Put the auto switch on the surface of the cylinder tube. e w Auto switch mounting band Auto switch Auto switch mounting bracket q D-A44 type Tie-rod Auto switch mounting screw M5 x 0.8 x 16 L Auto switch Cylinder tube Hook 1.

MGC

M L Slide bearing Ball bushing bearing Nil S n 2 pcs. 1 pc. n pcs.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZM With valve 07 5 K E15 LZ 1 S A H L Supply valve, Release valve ZM 07 H 2 E15 L Without valve Vacuum switch electrical entry Nozzle diameter Nil L Grommet type, with 0.6 m lead wire Grommet type, with 3 m lead wire C Connector type, with 0.6 m lead

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

45

AXT100-DS25015 030 050 L Terminal no.

Rotary Table Series MSU

Free-mount Without Auto Switch Unit 20 90 S M SUA With Auto Switch Unit 20 90 S D SUA L R73 M Number of auto switches 1 pc. 2 pcs. S With auto switch unit Nil Nominal size (torque) For 1 piece, a right hand auto switch is installed.

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

F/ISE

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Tf = F x l (Nm) Load : Angular acceleration g = 9.8m/s Load 2 = (rad/s) Lever t : Rotation angle (rad) t : Rotation time (S) Shaft axis Rotary actuator 12 Step Step 2 Consider the impact at the end of the rotation. 3 Consider the allowable shaft load. 1.

NVZseies

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

3 Way,3 Port Solenoid Valve NVZ Series

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

JA/JAH/JB/JS

How to Order J S 32 10-125 Stainless steel type Dust cover material Series JS Symbol Nil S Material Fluoro rubber Silicon rubber Applicable bore size (mm) Precautions Be sure to read before handling. Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions.