7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

17

12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

15

LEC MELSERVO-J3 HF-KP V V MELSERVO-J4 HG-KR V V LEC S YASKAWA Electric Corporation -V SGMJV V V SANYO DENKI CO., LTD.

Compact Type Dual-Rod Cylinder Series CXSJ

30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

CE

F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic

CE

F9PWV F9BWV A93 M9N M9P M9B F9NW F9PW F9BW F9BA 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic

RSQ

4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC A + 2 stroke RB Built-in

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Compact Guide Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV M9NA v v V v v IC circuit 3-wire (PNP) M9PAV M9PA v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV M9BA v v V v v Water resistant type auto switches can be mounted on the above models,

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MX Operating Conditions MTS m: Load weight (kg) V : Speed (mm/s) P : Operating pressure (MPa) Mounting orientation: Reexamine operating conditions.

A

P-80 (N)

Basic Type/Direct Mount Type

(mm) Switches P: Operating pressure (MPa) V: Speed (mm/s) Stroke (mm) Mode of operation (horizontal, inclined, vertical) Mode of operation Note 1) Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure Guide W Lo First tentative bore size determination F1 D 1.6 x P First tentative bore size determination F2 D 1.6 x P First tentative bore

Model Selection 1

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Load voltage Lead wire length (m) 0.5 (Nil) AC Wiring (output) Indicator light DC Auto switch model Applicable load Type Special function Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Load voltage Lead wire length (m) 0.5 (Nil) AC Wiring (output) Indicator light DC Auto switch model Applicable load Type Special function Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication