CL

x 1.5 l m t Applicable snap ring Part no.

3 Port Solenoid Valve

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 12 Flow characteristics 23 Valve model C[dm3/(s bar)] 0.037 0.076 0.054 0.099 C[dm3/(s bar)] 0.054 0.099 0.037 0.076 b 0.11 0.07 0.35 0.23 b 0.35 0.23 0.11 0.07 Cv 0.008 0.016 0.015 0.024 Cv 0.015

Speed Controller with Indicator

13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10/32-04 AS12l1FSGl-M5-06 6 10.4 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-06 M5 x 0.8 10/32UNF 8 9.4 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSGl-M5

Valve Single Unit

(Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 5-Rc 3/8, 1/4 02 03 02 03 L plug connector (L): SX7140(R)-LM plug connector (M): SX7140(R)-MManual override (Press and turn for the locking type.)

Compact Cylinder with Lock Series CLQ

Carbon steel 16 For 50 or larger only 821 Series CLQ Dimensions: 20, 25 Basic style (Through-hole/Both ends tapped common): CLQB20/25 Extension locking LOCK M5 x 0.8 Rod side cylinder port 2 x 5.4 through 2 x 2 x 9 depth of counterbore 7 depth VH Q H thread effective depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Flat Ribbon Cable Assembly 2 x M2.6 x 0.45 Cable length (L) 10 pins 20 pins 26 pins AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 1.5 m 3 m 5 m D-sub Connector Cable Assembly Cable Color List of Each Terminal No. Terminal no.

CL

x 1.5 l m t Applicable snap ring Part no.

VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

VS 8-2/VS 8-4

1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 1/8" 4(A), 2(B) port (n-1) x 19 52 3 U side D side n Station number 4 5 2 1 Indicator light L2 45 L1 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 Circular connector cable assembly AXT100-MC26-015 :1.5 m AXT100-MC26-030 :3.0 m AXT100-MC26-050 :5.0 m 4 x M5 mounting holes

Rotary Table/Vane Style Series MSU

MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

3 Port Solenoid Valve Metal Seal Series VZ200 1

5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications Manifold

C85

(mm) 4 4 6 6 8 10 Piston rod thread M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 Space-saving Port size M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 G 1/8 G 1/8 Mounting accuracy and rigidity made possible by means of faucet joint and direct mounting.

C85

(mm) 4 4 6 6 8 10 Piston rod thread M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 Space-saving Port size M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 G 1/8 G 1/8 Mounting accuracy and rigidity made possible by means of faucet joint and direct mounting.

SQ1000/2000

Exhaust outlet 96 Series SQ1000/2000 Optional Manifold Parts for SQ1000 External pilot specification [-R] External pilot port (M5 x 0.8) This can be used when the air pressure is 0.1 to 0.2 MPa lower than the minimum operating pressure of the solenoid valves or used for vacuum specifications.

CJ2

7 8 2.4 3.2 4 M3 X 0.5 NTJ-006A 6 10 16 M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A Refer to p.1.3-12 for details of the mounting nut.

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

1

3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Port Thread: M5 Female

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

KG

(mm) <M5> Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 8 10.4 13.4 22 16 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.