0.

N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.

125

fluctuation 10 to +10% of rated voltage* a a 12(P1) PA 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 100 V 0.78 (With indicator light: 0.81) 110 V 0.86 (With indicator light: 0.89) 200 V 1.18 (With indicator light: 1.22) 220 V 1.30 (With indicator light: 1.34) G, L, M Apparent power [VA] AC 100 V 0.78 (With indicator light: 0.87) 110 V 0.86 (With indicator light: 0.97) 200 V 1.15 (With indicator

CLA

p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

3 Port Solenoid Valve Rubber Seal Series SY100 1

0.5 (With indicator light: 0.55) (A) 2 0.9 (With indicator light: 1.0) 100 V 110 V [115 V] 1.0 (With indicator light: 1.1) [1.1 (With indicator light: 1.2)] 3 (R) 1 (P) 1 (R) 3 (P) Apparent power (VA) AC 1.8 (With indicator light: 1.9) 200 V 1.9 (With indicator light: 2.0) [2.2 (With indicator light: 2.3)] 220 V [230 V] Made to Order Specifications (For details, refer to page 4-3-17.)

3 Port Solenoid Valve Rubber Seal Series SY100

0.5 (With indicator light: 0.55) (A) 2 0.9 (With indicator light: 1.0) 100 V 110 V [115 V] 1.0 (With indicator light: 1.1) [1.1 (With indicator light: 1.2)] 3 (R) 1 (P) 1 (R) 3 (P) Apparent power (VA) AC 1.8 (With indicator light: 1.9) 200 V 1.9 (With indicator light: 2.0) [2.2 (With indicator light: 2.3)] 220 V [230 V] Made to Order Specifications (For details, refer to page 4-3-17.)

MNB

P-76 (M)

Mechanically Jointed Rodless Cylinders

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

CNG

500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) 1000 1000 Maximum speed: V (mm/s) 9-5-7 Cylinder with Lock Double Acting

PFxx-OMA1007

Signal Details 1 24 V 24 VDC: Output 2 NC Not connected 3 0 V 0 V 4 C/Q ITV: IO-Link ARS: Output 5 NC Not connected : Do not turn on the power supply. Standby E/P regulator (ITV) side M12 5-pin A-coded (Plug) Connector Pin No.

2/3 Port Valve for Various

Note 2) Value on option V, M (Non-leak, Vacuum). Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

ALF400 to 900, ALT-5/-9

4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l o V V 0 5 2 C D , V 0 0 1 C A e r u s s e r P f o o r P ) a

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l o V V 0 5 2 C D , V 0 0 1 C A e r u s s e r P f o o r P ) a

Modular/F.R.L. Units Series AC

2.3 2.3 2.3 U 55 53 70 W M28 X 1 M38 X 1.5 M42 X 1.5 AA 25 31 35.5 E 57 59 68 F 26.5 31 36 Q 5.4 6.5 8.5 X 6 7 7 Y 14 19 21 Z 28.5 38.5 42.5 H -2 3.5 3.5 P 44 46 54 AR20 AR30 AR40 Accessories Panel Mounting Nut (Optional) AR20P-260S AR30P-260S AR40P-260S Mounting Bracket Kit (Optional) AR20P-270AS-X48 AR30P-270AS-X48 AR40P-270AS-X48 Model AR20 AR30 AR40 D E 2 A C F IN OUT AA H P J Q V S W

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

VCL

v v Class 3 v v v v Class 2 v v v v Orifice dia.

CNG

Connector Grommet Diagnostic indication (2-color indication) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (PNP) 3-wire (NPN) IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication