ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

E-P HYREG

(MPa) Port 1 (P) pressure 0.9 MPa Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa (L/min(ANR)) (L/min(ANR)) Exhaust Flow rate Reduced pressure supply Exhaust Flow rate Reduced pressure supply VY150 0 1 VY170 0 1 Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa (L/min(ANR)) (L/min(ANR)) Exhaust Flow rate Reduced pressure supply

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

air-filter-e

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Air Preparation Equipment

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

MG

distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-52 MGPS50/80 (5) l = 50 mm, V = 200 mm/s (6) l = 100 mm, V = 200 mm/s 100 80 50 80 80 80 40 Load weight m (kg) 30 50

Tie-rod Type Hydraulic Cylinder

Cushion adjustment screw V T GA 4 x J GB Air release CHQ Width across flats G CDH9 CHK MM R (max.) d CHN W D E W CHM CHS a MA CH2 CX 0.3 F NA NB U A K C L 0 0.3 S + Stroke H CHA CHA B Z + Stroke RR Related Products ZZ + Stroke DWith rod boot e 10 l f h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A B C CDH9 a CX D E F d G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043

modular-press-e

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

39

M N O P Q J K L M N O P Q Part no.

Cylinder with Lock Series CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

125

66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula: L1=31n+29, L2=31n+14 n: Stations Station L dimension 2 3 4 5 6 7 8 L1 91 122 153 184 215 246 277 L2 76 107 138 169 200 231 262 1735

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Series KV2 Fittings

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

5 Port Solenoid Valve, Series VQC

10A-1 VVQ2000-10A-1 Dual flow fitting assembly VVQ1000-52A-C8 VVQ2000-52A-C10 Perfect block VVQ1000-FPGVVQ2000-FPGCYL to port Conforms to IP40 Individual SUP spacer VVQ1000-P-1-C6 VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S