3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

KF

(width across flats) Applicable tubing (mm) Effective area (mm2) Connection Weight (g) L4 d L2 L3 M A L1 Model thread R I.D.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

D2 A L2 H Connection threads Union Tee: KPQT, KPGT (M5) 2 x Applicable tubing Effective area mm2 D1 Model L1 TPH TPS A Connection thread R M H (width across flats) (M5) Note 1) Applicable tubing O.D. mm Weight g L2 M D2 M L1 M L1 D1 8 10 14 8 10 14 12 14 KPGT04-M5 KPGT04-01 KPGT04-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 KPQT04-M5 KPQT04

Slider Type Ball Screw Drive/11-LEFS Series

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 LER Y 400 400 400 400 Mer m LEH 200 200 200 200 LEY -X5 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS 2000 2000 2000 2000 11LEJS Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 25AL3 Z 500 500 500 500 LEC 0

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

NA-080-INFLW

2000 2000 3/8HyperFlare to 8000 ml/min Measurement Range 1ml/min to 8000 ml/min 35 LVR40-Z11N 150 80 150 80 3/8Liquid Regulator The LTV20 is a hybrid E/P Regulator and 1/4 dome-loaded liquid regulator combined.This provides rapid response and tight packaging for closed-loop flow control.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side D-side 14 34 103 2 103 174.5 (Single) 4n-3/8, 1/2 2, 4 port 94 62 59 17 174.5 (Single) 216.5 (Double) 216.5 (Double) 221.5 216.5 (3 position) 221.5 216.5 (3 position) Bottom ported M12 connector L: Dimensions n: Stations n P, R1, R2 port 2 3 4 5 6 7 8 9 10 1 Formulas L 157 L1 L2 L1 L2 176

Air Slide Table Series MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C Static moment Mr = W x 9.8 (L3 + C) W Examine Mr.

VZ1000

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Manifold Specifications

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

MXW Series Long Stroke Slide Table

=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

5

Clevis Pin x Material: Cast iron 80, 100 L2 Material: Carbon steel (mm) Part no.

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

REA/REB

Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

S070

-Outside Local Area: (800) 258-9200-www.stevenengineering.com R1.7 7 25.5 3.4 28.5 VT 3.5 150 (Lead wire AWG#26) 27 VP 5 150 (Lead wire AWG#26) ~ = VG 3.5 VP ~ = ~ = S070 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A

3 Port Solenoid Valve Series VQ100 1

= 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) M plug connector (M) (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 56 Indicator light 59.5<64.5> 300 66<71> Indicator light (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 50 P R 3 1 P R 3 1 < >: AC < >: AC Formula L1 = 10.5n + 9.5 L2 = 10.5n + 22.5 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

13 14 15 16 17 18 19 20 41 54 75 85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2