MGC

(26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (27) 21 (30) 33 (32) 21.5 (30.5) 19.5 (28.5) 40 38 37.5 35 36.5 31 33 34.5 32.5 29.5

MHL2

1 26 28 39 79 37 A Width across flats 17 (2 locations) (117) MHC2 30 48 Width across flats 19 (2 locations) MHT2 13 38 38 38 18 MHY2 18 2-M12 X 1.75 (Piston rod screw) Closed E 18 MHW2 60 86 Open F 28 28 MRHQ 4-M12 X 1.75 through Auto switch (Thread for mounting attachment) B C D E F G H 148 206 246 J 252 336 450 Model MHL2-40D MHL2-40D1 MHL2-40D2 72 130 170 348 466 546 116 174 214 288 406

MLGC

Note) Theoretical force (N) = Pressure (MPa) X Piston area (mm2) 3.2-3 Series MLGC Allowable Kinetic Energy Holding Force of Pneumatic Lock (Max. static load) R: Rod side, H: Head side Allowable kinetic energy Bore size Effective cushion length (mm) J (kgf/cm) (mm) 20 R: 7, H: 7.5 R: 0.35 (3.58), H: 0.42 (4.24) 25 R: 7, H: 7.5 R: 0.56 (5.67), H: 0.65 (6.66) 32 7.5 0.91 (9.3) 40 8.7 1.8 (18

3 Port Solenoid Valve Rubber Seal Series SY100 1

Refer to page 4-18-4.)

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

(mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to

Rotary Gripper Series MRHQ

MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3 x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-

S Couplers Series KK/KK13

Female thread type T D H L L (mm) T Connection female thread H Width across flats Effective area mm D L When connected 38.5 Body size L Min. bore Weight g Model KK3S-01F Rc 1/8 1/8 8.2 20.6 22.4 18.2 36 14 KK4S-02F Rc 1/4 10.9 54.1 36.6 54.1 50.4 1/4 25.4 19 -03F 54.8 42.7 43.4 51.1 Rc 3/8 14.4 KK6S-03F 63.9 80.9 91.2 58.6 1/2 31.2 24 -04F Rc 1/2 18 66.3 81.6 85.0 61 Nut fitting type (for

Series MXP Precision Air Slide Table

Stainless steel Guide block Steel ball Nickel plated Hard anodized 3 13 Carbon steel Aluminum alloy End plate Adjusting bolt Nickel plated 4 14 Carbon steel Resin Cover Adjusting nut Electroless nickel plated 5 15 Brass Resin Return guide Plug Hard anodized 6 16 Aluminum alloy Scraper Switch rail* Electroless nickel plated 7 17 Rare earth Brass Tube Magnet* Electroless nickel plated 8 18

Air Cylinder NCM Series Stainless Steel Cylinders

'trllrF I s NPrF NCME 150 'Noter For Din hole location see NCMC dimensions lfrw XK A a I K L LB N Nll w l Y 7A 0.250 Y4-24 0.50 o.624 0.86 0.38 0.251 o.34 3.75 o.75 Va-18 0.50 0.95 o.62 4.03 w& 1a.50 o.sc 034 o.t51 o.34 3.56 o.?5 7*tA 0.50 io.95 o.62 3.84 106 (17e) 0.312 5.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 10 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on the A

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time s Initial exhaust valve 0.07 0.08 0.09 0.23 0.27 KF (NW), K (DN), CF KF (NW), K (DN) Flange type KF (NW) KF (NW), CF KF (NW) Principle materials

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

EXxx-OMZ0016

Product Number EXW1-RDXNE4## EXW1-RDYNE4## EXW1-RDM#E3## EXW1-BMJA# EXW1-RD# Table of Contents Read before use 3 Safety Instructions 3 Limited warranty and Disclaimer/Compliance Requirements 4 Important Instructions concerning the Wireless System 10 SMC Wireless System 11 Features and Summary 11 System Configuration 12 System compatibility 13 How to Order 17 Summary of Product parts 18

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

IR1000/2000/3000

Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

ISA2

(Refer to the page 16-8-18.)

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.