15

Technical Data 1503 CY1S Series Dimensions CY1S/Bilateral piping type (NA) T GA S + Stroke Z + Stroke (NA) T GA PA HG HC HB H 2 x Square nut groove E F HB 4 x MM Thread depth M 2 x JJ (Equal about center) d D d PB (Equal about center) HT 4 x LD QW QW PW GP W HT 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG Q + Stroke L GB A G R GA GB A G GA 5.3 2 x For holding switch rail (6.9) 2 x 2

“

: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 20 L/min (ANR) IR3210-A 0.300 0.250 Set pressure [MPa] 0.200 Set point 0.150 0.100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 Supply pressure [MPa] 780 Regulator IR1200-A/2200-A/3200-A Series Construction Basic type (Knob): IR22l0-A r r ARJ Knob r r AR425 to 935 ARX AMR Pressure regulator spring IN side passage OUT side passage q ARM Flapper

mlu

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Vacuum Unit Series ZK2

Vacuum Unit Series ZK2 RoHS How to Order Single Unit Vacuum Pump System 08 P K 5 A L ZK2 00 ZK2 08 A K 5 A L 12 Ejector System (with Valve) ZK2 08 A N 0 N N 12 Ejector System (without Valve) Remains blank when option is not selected. q e r t y u i w e Combination of Supply Valve and Release Valve Note 3) q System/Body Type Supply valve Release valve Supply valve Release valve System Body

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30-02BG For 0.4 MPa setting 1 l/min (ANR) or less (at P2 = 0.4 MPa) Air consumption Ex.) ARP30-02BG-1 For 0.2 MPa setting 0.6 l/min (ANR) or less (at P2 = 0.2 MPa) Ex.)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BG For 0.4 MPa setting 1 l/min (ANR) or less (at P2 = 0.4 MPa) Air consumption Ex.) ARP30-02BG-1 For 0.2 MPa setting 0.6 l/min (ANR) or less (at P2 = 0.2 MPa) Ex.)

Pressure Switch/Reed Switch Type

Place them in alphanumerical order. q e w Switch Characteristics Description Symbol Example) IS10-N01-6PZ Nil N Rc NPT q q Thread type Max. contact capacity AC 2 A, DC 2 W 24 V or less Note 1) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi). This product is for overseas use only according to the new Measurement Law.

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to CCT63

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

RLQ

) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion Needle Adjustment Warning 1.

PF2A/PF2W

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

Vacuum Filter AFJ Series

4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

IZx-OMT0049

For IZTC41-L (controller), IZTP41-L and IZTP42-L are applicable. IZTP41-L and IZTP42-L can be mixed. Transistor input/output type and IO-Link type cannot be mixed. Table2.

Digital Flow Switch (Integrated display type) ( compatible)

min (4 L type) [008.0] 008.0 L/min (16 L type) [020.0] 020.0 L/min (40 L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_1] Set value (OUT1) Page 38 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_1] Hysteresis (OUT1) Page

Digital Flow Switch (Integrated display type) ( compatible)

L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_2] Set value (OUT2) Page 44 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_2] Hysteresis (OUT2) Page 45 [ dtH2] Delay time setting at ON [ 0.00] 0.00 s Page 45 [ dtL2] Delay

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

MU

Warning q If multiple cylinders are operated adjacent to each other, the magnets that are enclosed in the adjacent cylinders could affect the operation of the auto switches, causing the switches to malfunction. Therefore, make sure that the mounting pitch of the cylinders is at least that indicated in the table below. (mm) (mm) Part No. Size Dd9 H D L Part No.