VFR

[0.89] 0.24 [0.51] 0.74 [0.27] 0.79 0.53 0.24 3.1 [0.89] 0.24 [0.51] 0.74 [0.27] 2.8 [0.65] 0.24 [0.60] 0.68 [0.21] 0.89 0.53 0.27 3.2 [0.75] 0.26 [0.55] 0.73 [0.23] 0.89 0.53 0.27 2.5 0.18 0.58 3.0 0.27 0.34 (0.32) 0.42 (0.44) 0.43 (0.45) 2 position 3 position 10 Single 20 or less VFR2100 VFR2110 1 8 1 4 10 Double 20 or less VFR2200 VFR2210 1 8 1 4 1 8 1 4 1 8 1 4 Closed center 5 30 or

Compact 5-Port Solenoid Valve

(Red) Supply valve 2 40 5 1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39 41 Station 1: Black, Supply valve Release valve 1 2 3 4 5 6 7 8 9 10 Black White Black White Black White Black White Black White Black White Black White Black White Station 1 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 Station 1: White, Release valve Station 2: Black, Supply valve Supply valve Station

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

One-touch Fittings

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06

180

1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2-2.7 Mounting holes Manual override M3 X 0.5 External pilot port (Only external pilot style(R)) (C4, C6) 10 (54.5) 16.6 (M5) 30 25 2.5 20 2.5 33.2 23.2 Mounting holes 4.5 29.5 10 10.8 10.8 PE port 22.2 Die cast hole Foot bracket For manifold gasket positioning 2 2 1 5 P 3 (54.5) 2-G(PF)1/16 R port Rc(PT)1/8 P port 0 1 0 1 DIN connector (Y): VQZ212 (R)wYwC4, C6, M5 L plug connector (L)

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

PA3000/5000/PAX1000

PAX1000, PA3000, PA5000 Proper tightening torque Nm Connection threads 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 PB1000 Proper tightening torque Nm Connection threads 1/6 turn after tightening by hand M5 2 to 3 Rc 1/8 Since the threaded sections of the PB1000 are resin, take particular care not to tighten any more than necessary.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Compact Hydraulic Cylinder Double Acting/Single Rod Series CHQB 20, 32, 40, 50, 63, 80, 100 3.5MPa How to Order CHQB 50 30 D CHDQB 50 30 A72 D With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 23 f8 to 800 18 13 10 16 10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 15.5 25 25 f8 to 800 22 17 10 16 12 16 12 8 46 6 32 5.5 M10 x 1.25 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 19.5 32 31 f8 to 800 24 22 12 16 16 19 12 8 53 8 40 7.5 M14 x 1.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160 178.5

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.