Rotary One-touch Fittings Series KS/KX

UNF Weight (g) 10-32 UNF D1 D2 L2 A L1 Nylon Urethane KSL03-34S KSL03-32 8 10-32 UNF 9 14 17 23 23 29 56 64 20.5 22 22 23.5 23 25.5 26 26.5 5 32 16 2.5 10.4 3.5 3.5 12 21 1 8 12.7 1 8 1 4 KSL07-34S 14.29 17 1 4 4 13.2 8.6 8.6 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 1 8 26.5 30 18.5 5 16 1 4 1 4 3 8 21.6 14.9 6 15.2 17.46 26 17 29.5 31 34 37 35 38 22.23 3 8 30.5 25.0 7 17.9

Rotary One-touch Fittings Manifold Series KM

Thread R(PT) Port B min. port size Weight (g) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 6 4 KM14-04-06-01S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 19 26 39 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 64 65.5 67.5 1 8 1 4 3 8 8 4 KM14-04-08-01S-3 31 69.5 70.5 71 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 39 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 8 6 KM14

Air Slide Table Series MXQ

125 42.5 55 64 100 34 42.5 53.5 50 75 28.5 34 33 37.5 43 50 18.5 28 25 30 33.5 43 40 18.5 20.5 25 27 29.5 35.5 30 14.5 18.5 21 27 29.5 35.5 10 14.5 16.5 21 27 29.5 35.5 Allowable moment coefficient: Graph 2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 6 7 9 10.5 14 16.5 13.5 16 19.5 24.5 30 37 13.5 16 19.5 24.5 30 37 6 7 9 10.5 14 16.5 1.0 Allowable moment coefficient 0.7 0.5 Note) For A, A,

MXS Series Air Slide Table

70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 162 218 258 64

MXH Series Compact Slide

4 10 10 20 10 64 4 15 74 25 20 4 20 74 25 4 20 25 40 84 4 30 30 40 30 84 4 40 20 94 50 20 6 50 104 70 25 6 25 60 70 114 6 30 30 36 Compact Slide MXH Series Auto Switch Specifications Auto Switches/Proper Mounting Position for Stroke End Detection A 22 D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Process Pump <Fluororesin Type> Series PA3000

2-M5 with depth 8 139 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT Rc, G, NPT, NPTF 3/8 140 8 110 14 6 81 84 67 30 13 26 10 FLUID IN Rc, G, NPT, NPTF 3/8 EXH (P2) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

PC Wiring System Series PCW

Compatible PLC Manufacturers Input 32 points Input 32 points Output 64 points OMRON Corporation Mitsubishi Electric Corporation Fuji Electric Co., Ltd. Hitachi Ltd.

Clean Room Regulator/Fluoro Resin Type Series SRF30

1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(3.6Cv) 33 (1.8Cv) 28 (1.6Cv) PB 36 (2.0Cv) 75 (4.2Cv) 78 (4.3Cv) AEA Exhaust side effective area (mm) when P2 = 0.5MPa (72.5psi) 68 (3.8Cv) 38 (2.1Cv) 69 (3.8Cv) BEB Dimensions (mm) 1in=25.4mm SMC 64 181 2 B SMC D 68.5 P 1 X 12 5 R1 3 R2 PE T A 4 41 103 282 40 Base Mounted Type Series VQ5000 Flow Characteristics Conditions Upstream pressure: 0.7MPa ARBQ5000-00-A (PA) ARBQ5000-00-B (PB)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specifications Note 4) Value for low power consumption (0.5W) specifications 64 Series VQ1000/2000 VQ1000/Flat Cable Kit with Terminal Block Stations VV5Q11G0-(D) Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

PE port 3/8 NPTF P(SUP) port M5 x 0.8 External pilot port 21 18 (Only external pilot type (R)) 44.5 1/4 NPTF 11 50 R(EXH) port L type plug connector (L) DIN connector (Y) 92 300 (Lead wire length) 96 MAX.10 88.5 92.5 Indicator light Pg.7 Applicable cord O.D. 3.5 to 7 64 Cover diameter 1.5 Cross sectional area 0.23mm2 93.5 R P 86 3 1 R P 3 1 M type plug connector (M) 98.5 (Lead wire lengh)

DOC1020530

When setting up the device as a generic device Set the I/O communication format (input) Output data to Instance 150 and map size to 64 bytes. Set the I/O communication format (output) Input data to Instance 100 and the map size to 64 bytes.

LEC-OM02904

5 515-35 5.1 (No.PA) 52 5.1.1 53 5.1.2 54 5.1.3 55 5.1.4 56 5.1.5 57 5.1.6 57 5.1.7 58 5.1.8 59 5.1.9 5-10 5.1.10 5-11 5.2 (No.PB) 5-12 5.2.1 5-12 5.2.2 5-13 5.3 (No.PC) 5-20 5.3.1 5-20 5.3.2 5-21 5.3.3 5-24 5.3.4 5-27 5.4 (No.PD) 5-28 5.4.1 5-28 5.4.2 5-29 5.4.3 master-slave 5-33 6 616-12 6.1 62 6.1.1 62 TM 63 6.1.2 MR Configurator2 6.2 64

AC Servo Motor Driver (SSCNET Type)

Troubleshooting . 63 10.1 Alarms and warning list .63 10.2 Troubleshooting at power on .64 10.3 Alarm Display .65 -2- LECSS Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

LEC-W_C

LE ACT Controller(ACT Controller)2 /ACT Controller ACT Controller OS Windows7 64 LE-W2 Windows XP (32 ) Windows 7 (32 ) Windows 7 (64 ) ACT Controller / LECP6 (DC24V) LECA6 (DC24V) LECPA () ACT Controller 2 IO 5 - 3. 3.1 2 ABS()INC() ABS() 100mm 100mm INC() 30mm 30mm 30mm 6 - 0()(0 ) () 12 AREA ON (AREA)12 2 1 2 12 INP()ON INP()ON( ) 7 - 3.2 ABSINC3.1 INP ON INP ON 8 - () 12

ZQ-OM01401

No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6) 7 31 - No.ZQ-OM01401-B 9. 9.1 ZQA [] 5 to 50 () 2] 1) 20 [m/s 2] 2) 100 [m/s CE / UKCA (EMC RoHS ) 1) 10~150Hz X,Y,Z 2 () 2) X,Y,Z 3 () ZQ05A ZQ07A ZQ10A [mm] 0.5 0.7 1.0 [MPa] 0.35 0.43 1) -80 [kPa] 1) 5 10 22 [L/min (ANR) ] 1) 15 25 47 [L/min (ANR) ] (P) 0.3 to 0.5 2) 0 to 0.45 3) [MPa] (PD) [MPa] 0.75 8 6 4 65 68 70 4) () 64

CC-Link-E

SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 Rat e BS4 BS2 BS1 0 O FF O FF O FF O FF O FF O FF O FF 0( 156kbps) O FF O FF O FF 1 O FF O FF O FF O FF O FF O FF O N 1( 625kbps) O FF O FF O N 2 O FF O FF O FF O FF O FF O N O FF 2( 2. 5M bps) O FF O N O FF : : : : : : : 3( 5. 0M bps) O FF O N O N 64 O N O N O FF O FF O N O FF O FF 4( 10M bps) O N O FF O FF D i gi t of 10 D i gi t of 1 Setting