Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

air-filter-e

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

Air Preparation Equipment

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

17

1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Mey = 1/3 x 3.36 x 9.8 x (50+19)/1000 = 0.76 We = 3.36 A3 = 19 Obtain Meay = 4.2 from Va = 420 in Graph (2). 2' = 0.76/4.2 = 0.18 pitch, yaw moment: Graph (2) 2 = Me/Mea Meay Nm 4.2 420 V mm/s 3-3 Sum of the Load Factors 1 + 2 + 2' = Applicable because 0.008 + 0.15 + 0.18 = 0.34 < 1 Use is possible if the sum of the load factors does not exceed 1. 1 + 2 < 1 8-9-6 6 Model Selection Series

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Precision Regulator

4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !

ARJ1020F

1 !5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

RSH

6 i @7 !9 #9 @1 @9 #2 @6 @4 !0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

MLGC

1 !2 $0 $1 $2 $3 $4 $5 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 SUS for 20/25 Hard chrome plated Chromate Nitrided Nitrided (2) Nitrided Heat treatment Nickel plated (3) Dacrodized For spring lock and spring/air pressure lock Brake spring Spring steel wire !3 Oil impregnated sintered alloy Oil impregnated sintered alloy Bushing 40: Zinc bronze die casted !

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Clean Air Module

With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650 to 500 L/min With 10 One-touch fitting LVB3-7-2 With One-touch fitting GD Rc 1/4 LVB3-7-3 Threaded type LVB4-7 NPT 1/4 LVB3-7-4 Filter body only With 10 One-touch fitting, with differential pressure indicator With One-touch fitting Clean air filter assembly 6 LVB3-7-2-1 Rc 1/4, with differential pressure indicator LVB3-7-3-1