High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Connector LQ1H P.5 6 1 2 3 Female 4 5 P.6 6 1 2 3 Male 4 5 Elbow LQ1L P.7 6 1 2 3 Female 4 5 P.8 6 1 2 3 Male 4 5 Run tee LQ1R P.9 6 1 2 3 Female 4 5 P.10 6 Features 2 Series LQ1 ,TL/TIL 2 Series Appearance Class Port size Tube O.D.

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Modular Type Regulator Series AR

K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19

Series KG Stainless Steel One-touch Fittings

(mm) Effective orifice(mm 2) Weight (g) Nylon Urethane L1 M1 L2 Q D2 M2 D1 Part No. 4 6 KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 17 18.5 18.5 20.9 12.8 15.2 4.5 5.3 21 22 18 20 19.5 22.5 10.4 12.8 16 17 56 44.5 36 27.2 9 6 8 6 10 8 KGT08-10 15.2 18.5 26.5 28.5 23 26.5 6 6.8 18.5 21 14 21 10 12 KGT10-12 Male run tee: KGY Effective orifice(mm 2) A Applicable tube O.D.

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

0 RMA-16 RMY-16 2 2 Gasket bumper Piston seal !5 !6 RMA-63 RMY-63 RMA-40 RMY-40 RMA-25 RMY-25 Special resin MYA16-15-R6656 Scraper MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 !8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Power Clamp Cylinder

15) 63 How to Order Right type CKZ63 42 3681N R 47 37 54 78 Arm position/Mounting hole A A 20 Arm position Mounting hole Symbol Center type D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 6 6 6 8 8 8 Left type A B C D E F Center Right Left Center Right Left 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 144 65 280.1 150.2 22 L D3 Sectional view A-A (1:1) 80 How

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2-M4 x 0.7 Piping port 2-M3 x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Series AP3100

It is illustrated with an arrow pointing away from the valve body or a "filled" triangle on the schematic. f INLET E OUTLET Mounting hole Outlet (Downstream) Bottom port (Upstream) Inlet (Upstream) Porting Symbols Top view (Mounting hole on bottom) 2PW 2PWA 2PWB 2PWC q q q w 2 Ports 3 Ports 4 Ports q w w w 3PWD 3PWE 3PWG 3PWH 3PWF 3PWJ q q q q q q e e e e e e w w w w w w 4PWK 4PWL 4PWM 4PWN

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M

REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !

Slider Type/Ball Bushing Bearing

Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !