Compact Cylinder with Air Cushion

A A' A' R H R H Piston seals Wide size variations from 20 to 100 Model Counting Rod end configuration Standard stroke Auto switch 15 20 25 30 40 50 75 100 R(D)Q20 R(D)Q25 20 to 100 Direct mount auto switch 32 to 100 rail mount auto switch Through hole Double end tapped Foot type Front flange type Rear flange type Double clevis type R(D)Q32 R(D)Q40 Female threads Male threads R(D)Q50 R(D)Q63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

KJ

d (inch) Applicable tubing O.D.

T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

Cylinder

F UJ ' r-, ~\\ _ \. / r\ o .-: . <-III o ~ \ ~ r c-~~ ~ d" -, Rod end without L --' thread r~ \ A~OSW'tCh MM 8 NN LZ --' l S (Across H at) .. s .I w J 2051 3Gst 1561 I (mm) ,5 st lost ~ 1551 sst l. l0S" 20" 1.30>1. P .

10

D-G

•

D-PH9L(iZ) D-PH1L(Z) Wjring system DC3wire system AC2-wire system D-PH9 Source voltage 12, 24 VDC D-PH9L (Z) ~ ~ ) ,-~,Red Current consumption 16mA or less Output Load voltage 1OVDC-28VDC 80VAC-130VAC r--'r-~ White Load current 100mA or less BOmA or less Zener diode Internal voltage drop tOOmA O.6V or less S

2/3 Port Valve

e, r are for selection of valve composition.

Rotary Actuator NCRA1 Series Single Rack and Pinion

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

VCC

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

Title not found

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

NCRBIBwserbs

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Air Cylinder CLA Series Fine Lock Model

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

3 Port Solenoid Valve

D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

Title not found

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

Soft Start-up Valve AV2000/3000/4000/5000 1

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-