SMC Corporation of America
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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

r t e r t O-ring (for VCA40) O-ring (for VCA30) HNBR HNBR (2) (2) Manifold valve Manifold valve Steel Steel Tie-rod Tie-rod End plate assembly (U side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

(With HW, SW) M4 x 8 Rc, NPT, G 1/8 With DIN rail L1 5 38 3 38 L2 LED level meter Lead wire connector End plate L End plate R 3 0 3 0 3 0 center DIN rail 92 34 17 Setting dial P P P T T T U U U E E E L L L L L L S S S 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Plug 20.5 SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 24 L3 11.2

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A I 8 17.5 32 8 42 Side A Side B Scale: 40% 12 Rotary Gripper Series MRHQ Construction Description Material Note Parts list No.