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Threaded porb Builtln onelouch fttina r @Actuation Lerge bore sire Double acting Single rodl 0 lo 300 Double rod 101o 300 Long sbgke Double acdng Single rod125lo300 Ar i.latral load Dorrble acling Singls rod o32 to 040/5 io 100 050 to otoofi0 b 1m of auto switches Hffi l{on.roiating rod Doubleactng Single rod o12, 016/5lo 30 a2O, 025/5Io aA aP., o4A5 b 1O0 o50, 06?

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ble acting Single rod o12, o16/5to30 o20, o2t5 io 50 o32, @40l5lo 1N o50, 063/10 io 1m Double rod 612, E1U5lo 30 amlo @Q/5to50 o50, 0631 0 to 50 Large bor lize Double acting Single rod101o 300 Double rod 10 to 300 Standard Double acting Single @d o12. a16/5 lo 3A o20 p2t510 50 o32, o40l5 to 1 00 o50 to o10cy10 to 100 Double rod 012, 016/510 30 a20. o25/5 lo 5A 632, 64US lo 1OA o50 lo 0100

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 25MM MHL DBL-ACT AUTO-SW, ACTUATOR, MHL GRIPPERS, IE, 25MM MHL DBL-ACT AUTO-SW, 4.14468 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, SLIDE *LQA, ACTUATOR, MGP COMPACT GUIDE CYLINDER, MM, 40MM MGP SLIDE BEARING, 4.38116 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040040MGPM40??1.95??2.372.833.253.684.104.534.955.996.857.708.55

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, SLIDE *LQA, ACTUATOR, MGP COMPACT GUIDE CYLINDER, NM, 50MM MGP SLIDE BEARING, 13.17262 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040050MGPM50??3.36??4.004.735.376.016.657.297.939.5410.812.113.4

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, SLIDE *LQA, ACTUATOR, MGP COMPACT GUIDE CYLINDER, NM, 50MM MGP SLIDE BEARING, 8.92430 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040050MGPM50??3.36??4.004.735.376.016.657.297.939.5410.812.113.4

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, RODLESS, SLIDE BRG GUIDE, ACTUATOR, MY1M GUIDED CYLINDER, IE, 25MM MY1M DBL-ACT AUTO-SW, .00000 lb, SeriesDescriptionModelTypeNoteVol. no. (for std model)MY1Mechanically jointed rodless cylinderMY1M(W)Slide bearing typeWith cover (W) is also available.2 From P. 956

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, SINE, HIGH PREC, S/AXIS, ACTUATOR, REA MAGNETIC COUPLED SINE CYL, HE, 20MM REA DBL ACT SW CAPABLE, 11.88000 lb, SeriesDescriptionModelTypeNoteVol. no. (for std model)REASine rodless cylinderREABasic type--3 From P. 935

When working with delicate materials such as Silicone wafers, magnetic disks, or LCD substrates, non-shock actuation must be balanced with high speed/throughput. The REA provides the features needed to allow rapid transfer with a speed of up to 300mm/sec but virtually eliminates shock impact. Integrated cushion spears allow smooth acceleration and deceleration, while also simplifying construction

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

When working with delicate materials such as Silicone wafers, magnetic disks, or LCD substrates, non-shock actuation must be balanced with high speed/throughput. The REA provides the features needed to allow rapid transfer with a speed of up to 300mm/sec but virtually eliminates shock impact. Integrated cushion spears allow smooth acceleration and deceleration, while also simplifying construction

CLA

S start and next stop, accuracy speCified (depending lIpon Ihe cases, but 300 rom will be the standard) sometimes will nOI come true, please take into consideration. 11 ConSlr1lclion/Pa~ts list e ~-Long stroke design Parts List Notes : I No. Description Notes Material Material No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

TMH ASD AS Maximum return speed (mm/s) 100 200 300 Speed Controller Cylinder Solenoid valve Tubing Silencer AS-FE 6 ASD230FG CJ2 SYJ500 TU0604 1 m AN11001 KE 10 16 Cylinder size AS-FG AS-FG 20 ASD330FG CM2 SYJ700 TU0604 1 m AN11001 Cylinder size 25 AS-FP 32 Values at 0.5 MPa and 20C.

Brake mechanism added

100 200 300 400 500 100 200 300 400 500 Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K. NO NO YES Is it possible for cable of stroke reading cylinder to be wired separately from the power line? Is there any influence of noise? YES NO YES NO Can the system be operated below 14.5 mT? Do not use it since it will result in a miscount.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Vacuum Pad

Thus, from the formula on the front matter 9, the adsorption response time is as follows: T = (V x 60)/Q = (0.0031 x 60)/1.7 = 0.109 seconds = 109 msec It is possible to confirm that the calculation result satisfies the required specification of 300 msec. Front matter 15 Model Selection 8 Data #Selection Graph Selection Graph (2) Piping Capacity by Tube I.D.