Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Note 7) The sensor unit conforms to the CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 45 Fluid temperature [C] Digital Flow Switch Series PF2D For Deionized Water and Chemicals How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Output specification 0 1 NPN open collector 2 outputs

Air Pilot Operated Series NVSA

L..k.g.: Port to porl (internal) not 1o exceed 0.m7 cubic feet per minule at 100 PSIG (6.9 Kgtcm'). Op.r.Sng Pr..rur..! 28 'Vacuuh to 30o FSIG (20 Kglrcm?).

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

45 3 3 5.3 5.3 250.2 250.2 32 16 2 x M3 x 0.5 through 6.5 counterbore depth 5 (Same on the opposite side) 3.4 through 3 3 45 5.5 45 M2.5 x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2 x M3 x 0.5 through Steel ball Plug 2 x M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no.

EX250-SEN_eng

Resistance to ground should be 100 ohms or less. Troubleshooting 1 2 Cable color: Signal name Pin No.

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

IC

VY1 Resistance Vibration resistance 10 to 55 Hz at whichever is smailer of 1.5 mm amplitude X, Y, Z directions for 2 hrs. each Impact resistance 100 m/s2 (approx. 10 G) X, Y, Z direction G Water resistance Only display unit with cover is equivalent to IP65. It is equivalent IP40 without cover.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Connecting port R: Body side E: Axial side Nil Built-in magnet No Port Port D With magnet (For auto switch) Model Gripping force N (Effective value at 0.5 MPa) Note 1) External Internal Open/Close stroke (Both sides) Nominal size Port size Lubrication Weight g Note 2) Action Model Finger closing width (mm) Finger opening width (mm) Stroke (mm) 11221122MHR2-10 MDHR2-10 MHR2-15 MDHR2-15 6 105 (100

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34 59 25 Finger closing width (mm) Finger opening width (mm) 10 16 19 14 Opening/ Closing stroke (Both sides) 16 28 37 22 6 12 18 8 Stroke (mm) MHZ Weight (g) (2) 100

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHK 5 15.7 4.7 3.5 MHS 2-3 12 41.5 (45) 8 2-4.2 17 MHC2 15.5 8 0 -0.05 2 MHT2 2 3.5 0 -0.03 3.5 0 -0.03 MHY2 Open: 22 Closed: 14 MHW2 2-M3 X 0.5 thread depth 6 (Thread for mounting attachment) MRHQ Auto switch 15 15 6 5 5 6 2.3-12 Series MHR2/MDHR2 20 Without Auto Switch: MHR2-20R 57 54 3-M4 X 0.7 thread depth 8 B MHR2-20E port position P.C.D36 (Mounting thread) 60 120 o 14 120o A C 45 M5

！ Contact our sales office for delivery dates and prices as this is a special model. SP112X-012E P: PZ P.G.Information (Specialized Product) SMC CORPORATION Power Clamp Cylinder：φ25 4-14-1,SOTO-KANDA, CHIYODA-KU,

Model Arm opening angl A B CKZT25-105-DCL781EL 105 152.5 73.5 CKZT25-90-DCN7018N 90 148.4 69.4 CKZT25-45-DCN7017N 45 135.9 56.9 CKZT25-30-DCN577NN 30 131.7 52.7 Note: The product body does not include the clamp arm.

MLGP

32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

Series AP500

psig (0.69 MPa) 60 psig (0.41 MPa) Inlet pressure: 80 psig (0.55 MPa) 100 0.69 60 0.41 90 0.62 50 0.34 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 40 0.28 60 0.41 50 0.34 30 0.21 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 100 200 300 400 500 600 Flow rate (slpm, N2) 0 50 100 150 Flow rate (slpm, N2

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

100

Pressure range 100 to 100 kPa 30 inHg to 14 psi Scale range (Angular) 230 3-port solenoid valve SYJ500 series Accuracy 3% F.S.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

Industrial Filters

318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to