VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Dedicated Controller

Dimensions 5.2 Driver 150 160 168 5.2 20 A 105 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input

PSxx-OMR0001CN

) 2 LCD 3 7 (/) 6 7 () IP67 5 050 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 C 4 6 G1/8(ISO1179-1) F G1/8(ISO1179-1) M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 5 4 5 m46 8 6 5 m 0.50 mm 1.00 mm(26 ) 113 g() CE (EMC RoHS ) 119 2F 3 57 G 20 280 H 20 480 3 427 5 -15No.PS-OMR0001CN-J 2 () (2 ) X276 /(13 )2 -16No.PS-OMR0001CN-J 2 ON 150

Digital Gap Checker

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

Modular Type Filter Regulator Series AW

Note Description AW10, 20 AW30 AW40, 40-06 1 2 Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Polyacetal Replacement parts Part no. Description No.

Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 45 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AFF 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27 32

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

20 stations 8 Accessories Series VQ100 Blanking Plate Ass'y Plug Ass'y VVQ100-12A1 2 3 VVQ100-10A-1 Finishing O.D.7.8 For VV3Q11 12 3 Cover color : Ivory 1 4 17 10 5 Blank plate with gasket and screws. 11 16 17 20 L 52 30 10 1 Plug 2 Female contact VVQ100-10A-2 For VV3Q12 Vinyl multi-core cable VVRF 0.2mm2 20-core 3 Cable Length Model

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

1 5 1 0 25 20 1 5 30 25 25 2.

PSxx-OMT0001CN

280 H 20 480 3 428 5OUT2 6OUT2 7 8 -16No.PS-OMT0001CN-E 2 () (2 ) X276 /(13 )2 -17No.PS-OMT0001CN-E 2 ON 150 kPaON3(50 kPa)ON 1.5 F42.5 GH64 150 kPa (100 kPa200 kPa) 80 kPa220 kPaOFF (67 ) ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 3 m 3 m 3 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 5 m 5 m 5 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] -18No.PS-OMT0001CN-E

MLU

Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.

HEC_W-E

The value used for consideration should not be the very limit for the safety. 6.2.1 Performance of HEC006 1) Cooling capacity Radiating Water Temp.20 oC Radiating Water flowrate8L/min 1500 Cooling capacity W 1000 Fluid: Water 500 Fluid: Fluorinert FC-77 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-1 Cooling capacity of HEC006 2) Heating capacity Radiating Water Temp.20 oC

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150