LECA6_C

(OUT0OUT5 ) USY ON () INP ONBUSY OFF -No No 24V 0V ON OFF IN05 SVON No Min15ms DRIVE ON OFF OUT05 BUSY SVRE SETON INP 0mm/s INP ONOFF INP ONOFF 40 - (3) --No.(IN0IN5) DRIVE ON(OUT OFF) No.(IN0IN5 ) DRIVE OFF No.

Smooth Cylinder Series CQSY

Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible even at a

VNC

28 40 33 50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type Operation N.C.

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3 L4 2-3-15 16 Series SQ1000 Kit (PC Wiring System compatible flat ribbon cable kit) J Manifold Specifications PC Wiring System compatible.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 0 (No freezing) to 60 OFF AC 30 or less ON AC 30 or less DC 30 or less DC 40 or less Max. operating frequency (Hz) 3 Lubrication (2) Required (Equivalent to turbine oil Class1 ISO VG32) Manual override Yes (Non-locking) Mounting orientation Unrestricted 150/50 Impact/Vibration resistance (m/s2) (3) Note

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

VP3145/3165/3185

Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 0 (No freezing) to 60 OFF AC 30 or less ON AC 30 or less DC 30 or less DC 40 or less Max. operating frequency (Hz) 3 Required (Equivalent to turbine oil Class1 ISO VG32) Lubrication (2) Yes (Non-locking) Manual override Mounting orientation Unrestricted 150/50 Note 1) Based on dynamic performance test, JIS

Title not found

57 80 100 27 54 85 2.5 6 12 25 50 75 125 125 150 190 2.65 3.88 6 8.48 10.59 0.35 0.88 1.77 3.53 7.06 10.59 17.66 21.19 26.49 35.31 Comes with pre-filter mist separator AFM, and micro mist separator AFD.

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

AP10PA

gas Vacuum to 3500 psig (24.1 MPa) 1) 5000 psig (34.5 MPa) 10 psig (69 MPa) 150 psig (1.0 MPa) -40 to 71 C (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld NPT 1/8 inch NPT 1/8 inch 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 Mpa) source

α PneuAlpha HARDWARE MANUAL

Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) 9 PneuAlpha Hardware Specification 2 Table 2.8:Environmental and Electrical Specications Insulation Resistance 7 Mohm at 500V DC per EN60730-1

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

q"s

.;,1 '"1 , ,"1 20 40 60 Flow rate (l/min (ANR)) a' e 6 E .9 .t 0.0 . 3 o 20 40 60 80 1 Frow rale (l/min (ANa)) Series lTV201n Hysteresis Repeatability Linearity i .9 .g o 25 50 75 100 Inpll signal (%F.S.) 25 50 75 r00 Inputsignal (%F.S.)

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

AME

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

SFOD-OMT0005CN

DRIVE ON )No.3 1 OUT1 OUT5 OUT 4 OUT 3 OUT 2 OUT 1 OUT 0 2 OUT2 OFF OFF OFF OFF ON ON 3 OUT3 4 OUT4 (1)RESET ON OFF (2) (3) () OFF 0 5 OUT5 6 7 ON 8 BUSY () BUSY OFF 9 SVRE OFF OFFON ON 10 SETON SETON()ON OFF -33- Word Bit INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON )100 80% 40%(*1) *1 11 INP 0 () INP [ON] 100 80 40 12 AREA 12 ON 13 WAREA W1 W2 ON 14 ESTOP ON

JXCx-OMT0028CN

3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3 CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30 . 30 7.CN1(CONT) . 31 7.1 . 31 7.2 . 33 8.CNTB/PC . 34 8.1 . 34 9.LED . 35 9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (