Table of Contents

30% 50% 70% SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600 Stroke

High Pressure Coolant Valve

60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163

PFxx-OMJ0005CN

(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I

PF-OMM0004_C

5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*] [F90] 54 OFF [F98] 55 OFF [F99] 56 OFF 30 [F10](43 ) (4 L/min ) OUT2 -27No.PF-OMM0004-D [F 1] OUT1 OUT1 1.

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Vacuum Equipment

(50 to 250) Pad diameter (mm) -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Lifting force (N) Lifting force (N) How to read the graph Example: Workpiece weight 1 kg (Lifting force: 9.8 N) : Conditions/Number of pads: 5 pcs.

Ionizer

When using a feedback sensor at higher than 50 mm, refer to the graphs below.

VFN2000N

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other Manual override/Classification 1 2 3 4 5 6 7 9 Electrical entry Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Grommet Grommet terminal Conduit terminal DIN terminal G E T D Light/Surge voltage suppressor None Nil DIN terminal (Without

I/O Configurator (NFC version)

Registration of dummy Remote 75 6. Wireless system configuration example 76 6.1. Flow chart for using the wireless system (Refer to Step 2) 76 6.2. System Construction Example 77 6.3.

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

Slide Tables MX Series

60 75 100 125 150 175 200 225 250 275 300 Standard Stroke (mm) Bore Size (mm) 6 8 10 12 16 20 25 MXH MXS MXQ MXF MXW MXP Dual Rods For Twice The Force The MXS, MXQ, and MXW use a twin bore design to double the actuation force while maintaining the single bore height.

Clean Room Regulator/Fluoro Resin Type Series SRF30

52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable

Available in 50 and 63 bore sizes. Complies with NAAMS standard (CKZ3N); 9 opening angles: 15, 30, 45, 60, 75, 90, 105, 120, 135; 75 types of arm variations (CKZ3N); Metal cover and metal switch cassette options available; Optional manual handle operator (X2568) available

Available in 50 and 63 bore sizes. Complies with NAAMS standard (CKZ3N); 9 opening angles: 15, 30, 45, 60, 75, 90, 105, 120, 135; 75 types of arm variations (CKZ3N); Metal cover and metal switch cassette options available; Optional manual handle operator (X2568) available

AP500

(70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

PSE550/300

tubing) Resin pipe: Nylon, Piston area of sensor: Silicon Environmental resistance Vibration resistance Impact resistance Temperature characteristics Port size Material of wetted parts Sensor cable With sensor cable Without sensor cable 3-wire oval cable (0.15 mm2) 2-wire oval cable (0.15 mm2) 75 g 35 g Weight Note) Can detect differential pressure from 0 to 2 kPa within the range of 50